Elastomer-based MEMS optical interferometric transducers for highly sensitive surface stress sensing for biomolecular de
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Research Letter
Elastomer-based MEMS optical interferometric transducers for highly sensitive surface stress sensing for biomolecular detection Kazuhiro Takahashi, Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempakucho, Toyohashi, Aichi 441-8580, Japan; JST PRESTO, Chiyoda, Tokyo 102-0076, Japan Toshinori Fujie, JST PRESTO, Chiyoda, Tokyo 102-0076, Japan; School of Life Science and Technology, Tokyo Institute of Technology, B-50, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8501, Japan; Waseda Institute for Advanced Study, Waseda University, Shinjuku-ku, Tokyo 162-8480, Japan Reina Teramoto, Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempakucho, Toyohashi, Aichi 441-8580, Japan Isao Takahashi, Nobutaka Sato, and Shinji Takeoka*, Department of Life Science and Medical Bio-Science, Graduate School of Advanced Science and Engineering, Waseda University, Shinjuku-ku, Tokyo 162-8480, Japan Kazuaki Sawada, Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempakucho, Toyohashi, Aichi 441-8580, Japan Address all correspondence to Kazuhiro Takahashi, Toshinori Fujie at [email protected]; [email protected] (Received 5 November 2018; accepted 14 January 2019)
Abstract We developed a microelectromechanical-system optical interferometer based on an elastomer nanosheet using a polystyrene-polybutadienepolystyrene (SBS) triblock copolymer for a suspended membrane as a way to improve the stress sensitivity for surface stress detection. The elastomeric SBS nanosheet provides a low Young’s modulus of 28 ± 11 MPa, a large elastic strain of 24 ± 12%, and high adhesiveness, of which the surface charge and mechanical property are tunable by layer-by-layer (LbL) deposition of polysaccharides. A freestanding SBS nanosheet can be formed above a microcavity using a dry transfer technique without applying vacuum or high-temperature processes. The maximum deflection associated with molecular adsorption increased by sevenfold compared with a parylene-C-based optical interferometric transducer.
Introduction A detection technique for various biomarkers in blood or urine enables us to make an at-home diagnosis simply, rapidly, and inexpensively. In particular, semiconductor-based biosensors such as ion-sensitive field-effect transistors (ISFETs) and microelectromechanical-system (MEMS)-based biosensors are expected to be developed for multi-marker detection using a single chip. ISFETs detect the charge of molecules immobilized on a channel for ion,[1,2] DNA,[3] or protein[4] detection. Although an ISFET-based biosensor can realize a large-scale integration for the parallel processing of multiple biomarkers, the detection area is limited by several nanometers from the substrate surface owing to the Debye length, and therefore an ISFET-based biosensor cannot be applied to the detection of charged macromolecules.[5] For the
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