Direct Write Microbatteries for Next-Generation Microelectronic Devices
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Direct Write Microbatteries for Next-Generation Microelectronic Devices Karen E. Swider-Lyons,*¥ Alberto Piqué,+ Craig B. Arnold,+ and Ryan C. Wartena* * Code 6171 and +Code 6372 Naval Research Laboratory Washington, DC 20375-5342 USA ¥ [email protected]
ABSTRACT Microbatteries and integrated microbattery systems are likely to be the sole power source or a power-source component for the next generation of microelectronic devices. As part of the LEAPS (Laser Engineering of Advanced Power Sources) program, custom-designed microbatteries and ultracapacitors will be integrated in microelectronic circuits for optimum performance. The Naval Research Laboratory’s Matrix-Assisted Pulsed-Laser Deposition Direct-Write (MAPLE DW) process is used to rapidly fabricate various primary and secondary (non-rechargeable and chargeable) electrochemical power sources. This laser forward-transfer process can be used to transfer any type of battery material and battery material mixtures, including polymers, hydrated oxides, metals, and corrosive electrolytes. Additional laser micromachining capabilities are used to tailor the battery sizes, interfaces, and configurations. Examples are given for planar RuO2 ultracapacitors and stacked alkaline batteries.
INTRODUCTION The trend in materials development programs is toward the miniaturization of electronics and devices. Yet, an important question has not yet been answered: what will be the power source for this next generation of micro- and nano-electronic devices? We discuss in this manuscript why and how integrated microbatteries and ultracapacitors may be used in next-generation microelectronics, and show how a laser-based direct-write process, MAPLE DW, can make an impact on this growing field. As part of our LEAPS (Laser Engineering of Advanced Power Sources) initiative, primary and secondary microbatteries and micro-ultracapacitors will be fabricated and integrated into microelectronics. Examples are given for stacked alkaline batteries and planar RuO2 ultracapacitors. Battery overview A schematic of a battery with a button-cell geometry is shown in Fig. 1. Every battery cell has seven major components: (A) positive electrode, (B) negative electrode, (C) separator, (D) electrolyte, (E & F) current collectors, (G) packaging, and (H) interconnects to an electronic load. The composition of each component is a function of the battery chemistry (e.g., alkaline, lithium, etc.) and its chemical stability. See reference [1] for an overview of different battery chemistries.
Q3.1.1
A: B: C: D: E: F: G: H:
Positive electrode Negative electrode Separator Electrolyte Positive current collector Negative current collector Packaging Interconnects
e-
G
H
E A
load
C
D
B F
Figure 1. Schematic of the cross section of a battery cell. Alkaline batteries typically have positive electrodes of “electrolytic MnO2”, a defective hydrous manganese oxide (MnO2-x•yH2O) that is a mixed ionic/electronic conductor. Each MnO2 electrode is a composite of the electrolytic MnO2 for charge storage, hig
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