Effect of the Variation of Film Thickness on the Properties of Multilayered Si-Doped Diamond-Like Carbon Films Deposited
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Effect of the Variation of Film Thickness on the Properties of Multilayered Si-Doped Diamond-Like Carbon Films Deposited on SUS 304, Al and Cu Substrates An Li, Qingchun Chen, Guizhi Wu, Xin Huang, Yunfeng Wang, Zhibin Lu, Guangan Zhang, and Xiangfan Nie Submitted: 27 April 2020 / Revised: 30 August 2020 / Accepted: 3 October 2020 Multilayered Si-doped DLC film with thicknesses of 5.5, 10.1, 21.8 and 28.3 lm was deposited on stainless steel, aluminum alloy and copper alloy substrates by plasma-enhanced chemical vapor deposition. The mechanical and tribological properties of multilayered Si-doped DLC films deposited on three different substrates were evaluated in this study. The hardness of the multilayered Si-doped DLC film of different substrates is related to the substrate material and internal stress. In a scratch test, the adhesion of the multilayered Si-doped DLC film increased with the film thickness. The multilayered Si-doped DLC film with a thickness of 28.3 lm on stainless steel substrate has the highest adhesion of 31 N. The adhesion of the multilayered Si-doped DLC film with different thicknesses on the copper alloy is relatively poor. The ballon-disk friction test results show that the multilayered Si-doped DLC film with thicknesses of 5.5 and 10.1 lm is prone to shear deformation and exhibit high friction coefficient. The uneven stress distribution and surface deformation of the multilayered Si-doped film deposited on the aluminum alloy and the copper alloy cause the fluctuation and rise of the friction coefficient. The wear resistance of multilayered Si-doped DLC films on different substrates is related to stress shielding and adhesion strength. Keywords
mechanical properties, multilayered Si-doped DLC film, thicknesses, tribology
1. Introduction Stainless steel, aluminum and copper alloys are based on their excellent corrosion resistance, good processability, high electrical conductivity and high-cost performance, making them the most widely used metal materials in industrial production and living applications. However, their low hardness and poor wear resistance are one of the main causes of material loss. These shortcomings can be overcome by depositing diamondlike carbon (DLC) films with unique properties on the substrate surface (Ref 1-3). DLC films have attracted wide attention in the academia for their unique properties such as high hardness, excellent friction properties, optical transparency and superior An Li, State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, Peoples Republic of China; and School of Materials Science and Engineering, Lanzhou Jiaotong University, Lanzhou 730070, Peoples Republic of China; Qingchun Chen, Guizhi Wu, Zhibin Lu, and Guangan Zhang, State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, Peoples Republic of China; Xin Huang, School of Materials Science and Engineering, Chongqing University of T
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