Effects of Preferred Orientation on the Tribological Behavior of the TiN and CrN Films by the CAIP
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0890-Y08-17.1
Effects of Preferred Orientation on the Tribological Behavior of the TiN and CrN Films by the CAIP Sang Geun Bae, Yong Ki Cho, Kyoung Il Moon, Sang Gweon Kim and Sung Wan Kim Plasma Enhanced Technology Development Team, Advanced Materials Division, KITECH, 994-32 Dongchun-dong, Yeonsu-gu, Incheon 406-800, KOREA
Abstract For the better understanding of anti-wear properties of hard coating films, the effects of preferred orientation, surface roughness, and surface hardness on the tribological property of TiN and CrN films have been studied. TiN and CrN films were deposited by cathodic AIP (CAIP) with working temperatures of 350~450 ºC, working pressures of 1~5Pa, arc currents of 50~90 A, and bias voltages of 30~150V. The characteristics of microstructure and its effect on the friction coefficient were investigated with working conditions. The preferred orientation of the film was examined by XRD. The friction coefficient was determined using ball on disk tribometer. The preferred orientation of films was changed from (200) to (111) with decreasing working pressure and increasing bias voltage. It is reported that TiN coating with strong (111) orientation have better tribological property, but, in this study, although similar tendency was also found in TiN, the tribological property was increased with diminishing (111) orientation in CrN films. It is concluded in this study that the tribological property is not affected only by the orientation of the film, but it depends on the combined properties of surface roughness, surface hardness, and orientation of the film. The friction coefficients of TiN and CrN were 0.48~0.52 and 0.49~0.53, respectively. Keywords: cathodic arc ion plating (CAIP), hard coating, tribological property, TiN, CrN
1. INTRODUCTION In recent years, hard and wear resistant TiN and CrN coatings are deposited by Cathodic Arc Ion Plating (CAIP) methods because it is essential for mass production with the advantages of low cost, low temperature process, high deposition rate and high adhesion by high ionization. However, its surface roughness is not good compare to sputtering because of large amount of droplets. Nitride coatings deposited by PVD techniques are well established to mechanically and chemically protect materials surfaces. Friction properties are a consequence of structure and orientation of crystals in the film [1]. The corrosion properties are dependent of the porosity and density of the coatings [2, 3]. For metal cutting tools, two of the most common commercial PVD coatings are TiN and CrN. Of these TiN is by far the most extensively investigated and used material. This is partly due to the ease with which TiN can be deposited to its very hard and wear resistant cubic NaCl phase and partly due to its beautiful golden color. CrN, with its excellent high temperature stability [4-6], is often utilized in applications where a hard, oxidation- and corrosion-resistant coating is required. A characteristic of CrN is that it is more difficult to deposit to its cubic NaCl phase, due
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