Electroless Deposition of Gold Nanoparticles Over Silicon-based Substrates

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Electroless Deposition of Gold Nanoparticles Over Silicon-based Substrates Hassan Borteh1, Nick Ferrell2, Randall Butler3, Susan Olesik4, and Derek Hansford1,2 1 Biophysics Program, The Ohio State University, 1381 Kinnear Rd., Suite 100, Columbus, OH, 43212 2 Biomedical Engineering, The Ohio State University, 1381 Kinnear Rd., Suite 100, Columbus, OH, 43212 3 Materials Science and Engineering, The Ohio State University, 1381 Kinnear Rd, Suite 100, Columbus, OH, 43212 4 Chemistry, The Ohio State University, 100 W 18TH AVE, Columbus, OH, 43212 Abstract:

The use of proteins and peptides to deposit and pattern metallic nanoparticles is becoming increasingly important. This method provides an inexpensive procedure to produce patterned and continuous metallic nanoparticles on variety of substrates such as silicon dioxide, silicon nitride, and polyimide. In this work, we explore the use of proteins and peptides for patterning and depositing gold nanoparticles onto silicon substrates coated with Ni, thermally grown SiO2, and native oxide. We used two different peptides or proteins for this experiment. One is 3X FLAG peptide (Sigma Aldrich) and the other is bovine serum albumin (BSA). To pattern the peptides on the substrates, we used two different methods, photolithography and micro-transfer molding. For photolithography, S1813 photoresist polymer was patterned on the substrates through a cleanroom process. In the micro-transfer molding process, a poly(dimethylsiloxane) (PDMS) mold was made out of the photoresist pattern. Poly(propyl methacrylate) (PPMA) was spin coated on the PDMS mold and stamped on the substrate at elevated temperature. The proteins were adsorbed on the surface either physically or covalently. To deposit gold nanoparticles, the substrates with adsorbed proteins were covered with aqueous HAuCl4 solution. The proteins catalyze gold nanoparticles reduction from the solution. To characterize nanoparticles we used scanning electron microscopy (SEM) and Electron Beam Induced Current (EBIC). Introduction: Use of peptides for controlled growth and deposition shows great promise for environmentally-friendly production of solid-state microdevices. Previous work demonstrated the reaction of silicic acid with poly-L-lysine, resulting in patterned silica deposition on silicon substrates [1, 2]. Work on the use of peptides for the growth of gold nanoparticles in solution showed that tyrosine residues in peptides contributed in gold reduction from HAuCl4 [3]. Evidence indicates the ionization of phenolic group on tyrosine residues during the reduction [3]. Previous work indicates the affinity of gold (III) complexes to BSA [4]. BSA can bind such complexes and reduce gold. Based on the work by Marcon et al. [4], we assume

that histidine residue is the possible binding and reduction site for the complexes. BSA and peptides with such residues can bind gold (III) complexes and act as an enzyme. Therefore, they decrease the energy barrier for the reduction process. BSA has affinity to hydrophobic compounds s