Surface Smoothing upon Deposition of Nanoparticles on Single Crystalline Substrates
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		    21 Mat. Res. Soc. Symp. Proc. Vol. 585 © 2000 Materials Research Society
 
 EXPERIMENTAL Co and Ge nanoparticles were generated by DC magnetron sputtering (300 W) in 1.0 Torr of ultraclean argon (		
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