Surface Smoothing upon Deposition of Nanoparticles on Single Crystalline Substrates

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21 Mat. Res. Soc. Symp. Proc. Vol. 585 © 2000 Materials Research Society

EXPERIMENTAL Co and Ge nanoparticles were generated by DC magnetron sputtering (300 W) in 1.0 Torr of ultraclean argon (

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