Experimental validation of internal model approach for tracking control of a MEMS micromirror without angular velocity m
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ORIGINAL PAPER
Experimental validation of internal model approach for tracking control of a MEMS micromirror without angular velocity measurement Hui Chen · Weijie Sun
· John T. W. Yeow
Received: 24 April 2020 / Accepted: 1 October 2020 © Springer Nature B.V. 2020
Abstract This paper addresses the angular tracking control for an electromagnetic MEMS micromirror. The problem is formulated in the output regulation framework for output feedback systems. An extended internal model-based output feedback controller is developed, which can achieve excellent angular tracking and allow large parameter uncertainties ranging within any compact set. In addition, the simplified robust controller features itself in the aspect of having a very simple tuning procedure with only one adjusting parameter. The control scheme is based on sensing the angular position and incorporates only tracking error to adjust the desired output angular of micromirror. As a result, it is independent of the angular velocity and removes the noise amplification problem of the first-order backward difference method in statefeedback design. It also relaxes the extra measurement hardware, which reduces the complexity of tracking controller. In general, the proposed control scheme is beneficial for the integrated packaging of micromirror H. Chen School of Computer and Information Engineering, HeNan University, KaiFeng, HeNan 475001, China W. Sun (B) School of Automation Science and Engineering, South China University of Technology, GuangZhou, GuangDong 510641, China e-mail: [email protected] J. T. W. Yeow Systems Design Engineering, University of Waterloo, Waterloo, ON N2L 3G1, Canada
devices. Experimental validation is provided to verify the effectiveness of the proposed controller, which is programmed by LabVIEW and implemented with a field programmable gate array platform. The sinusoidal waves with different frequencies are utilized as the reference signals. It is shown that the controller offers improved steady-state performance over the existing schemes. Keywords Micromirror · Output regulation · Output feedback · Robust control · Uncertain system
1 Introduction With the development of microfabrication technology, the torsional micromirror offers many new applications in various optical instruments including fiber optic communication, high-resolution display and biomedical imaging [1–3]. As the most essential part of micro-opto-electromechanical systems (MOEMS), the micromirror plays a major role in governing reliability and stability of an optical device [4]. Thus, methods from the viewpoint of device design have been investigated to improve its performance in the past few years. Some approaches have been suggested such as modifying the arrangement of driving electrodes, adding extra I-shaped beams and embedding the driving coil, see [5–8] and the references therein. However, these approaches usually raise challenges of complicating the fabrication process. To solve such a technical dilemma,
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