Fabrication of SnO 2 Nano Patterns Using Surface Relief Grating
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Fabrication of SnO2 Nano Patterns Using Surface Relief Grating 1
Fadong Yan1, Lian Li1, Pilho Huh1, Yanping Wang1, Lynne A Samuelson2, and Jayant Kumar 2 Center for Advanced Materials, University of Massachusetts Lowell, Lowell, MA, 01854 U. S. Army Natick Soldier Development and Engineering Center, Natick, MA, 01760 1
ABSTRACT Nano- and micro-structured SnO2 has been widely utilized as gas sensors. These SnO2 based gas sensors are often made by chemical etching, vapor deposition or lithography. Here we2 report a facile and vacuum-free technique to fabricate large area one-dimensional periodic SnO nano arrays using surface relief grating created on azobenzene functionalized polymer thin films as templates. Atomic force microscopy, scanning electron microscopy and energy dispersive Xray spectroscopy characterizations confirmed the successful fabrication of SnO2 nano arrays. The fabricated SnO2 structures exhibited the same periodicity as the templates with a width of a few hundred nanometers. INTRODUCTION Fabrication of nano-structured arrays has recently attracted attention due to their applications in sensors [1], photonics [2], electronics and optoelectronics [3], magnetics [4], and in energy storage [5]. Semiconducting SnO2 is used as gas sensors, which detect gases due to a 2 change in electrical conductivity [6]. With a higher surface area to volume ratio, nano- and micro-structured SnO2 based gas sensors are expected to be more sensitive compared with SnO films. Nano-arrays are typically made by electron-beam lithography [7], photolithography, soft lithography [8], and electrochemical deposition [9]. However, most of these techniques involve multiple steps. They lead to long processing time, high production cost, and are limited to small area (
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