Far- and Deep-Ultraviolet Spectroscopy
This book is the first comprehensive work to be published on far-ultraviolet (FUV) and deep-ultraviolet (DUV) spectroscopy, subjects of keen interest because new areas of spectroscopy have been born in the FUV and DUV regions. For example, FUV spectr
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r- and DeepUltraviolet Spectroscopy
Far- and Deep-Ultraviolet Spectroscopy
Yukihiro Ozaki • Satoshi Kawata Editors
Far- and Deep-Ultraviolet Spectroscopy
123
Editors Yukihiro Ozaki School of Science and Technology Kwansei Gakuin University Sanda, Hyogo, Japan
ISBN 978-4-431-55548-3 DOI 10.1007/978-4-431-55549-0
Satoshi Kawata Graduate School of Engineering Osaka University Suita, Osaka, Japan
ISBN 978-4-431-55549-0 (eBook)
Library of Congress Control Number: 2015943615 Springer Tokyo Heidelberg New York Dordrecht London © Springer Japan 2015 This work is subject to copyright. All rights are reserved by the Publisher, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilms or in any other physical way, and transmission or information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed. The use of general descriptive names, registered names, trademarks, service marks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. The publisher, the authors and the editors are safe to assume that the advice and information in this book are believed to be true and accurate at the date of publication. Neither the publisher nor the authors or the editors give a warranty, express or implied, with respect to the material contained herein or for any errors or omissions that may have been made. Printed on acid-free paper Springer Japan KK is part of Springer Science+Business Media (www.springer.com)
Preface
This book provides the fundamentals of science and technology of far and deep ultraviolet (UV) spectroscopy. It has been known that many atoms and molecules exhibit effective optical response in far and deep UV regimes, hence a variety of applications of far and deep UV (FUV and DUV) spectroscopy have been expected in materials analysis, biosensing, catalysis, sterilization, and semiconductor fabrication. In recent decades, significant progress has been made in the development of detectors and light sources as well as optical materials to manipulate far and deep UV light. Compared to visible and near-UV spectroscopy, studies with DUV– FUV spectroscopy as analytical methods are still in progress. Due to the strong absorptive characteristic of materials, this spectroscopy has been considered to be applicable only to limited cases. DUV–FUV spectroscopy can be used for fundamental chemistry, biology, material science, and industrial applications, and the reader will find here a diversity of knowledge about this wavelength range. The UV region is generally recognized as that of 10–380 nm, although the region has no international official definition. The 10–380 nm region corresponds to the 1,000,000–26,316 cm1 region. Thus, one can easily recognize that from the high-en
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