Fundamentals of Energy Beam Interactions with Solids
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FUNDAMENTALS OF ENERGY BEAM INTERACTIONS WITH SOLIDS
W. L. Brown,
AT&T Bell Laboratories,
Murray Hill,
NJ
07974
ABSTRACT High intensity pulsed beams of photons, electrons and ions provide extremely efficient means for electronically exciting solids near their surfaces. Among these three, laser beams with ever-increasing time resolution have also served as diagnostic probes to clarify the picosecond time scale on which interchange of energy between the electronic and the vibrational states of solids takes place at very high excitation energy densities. Because of this rapid transfer of electronic excitation to heat, pulsed beams provide versatile tools to investigate transient thermodynamic phenomena in solids, particularly those associated with metastable phases such as amorphous silicon.
I.
INTRODUCTION
When high intensity pulsed beams of photons, electrons or ions irradiate a solid, energy is introduced very rapidly into electronic excitation of the solid and then flows quickly into the vibrational states of the solid as heat. The quantitative details of the energy flow and its consequences in the material properties of the solid have continued to be stimulating topics for study [1]. While relatively low intensity beams also have important implications for materials and devices, a number of which are included in the papers of Mayer [2] and Gibbons [3), this paper will consider only high intensities and short pulses. It will also limit its attention al2st entirely to silicon. The pulse durations involved exten5 from -10- 2 to -10seconds during which energy densities between 3x10 and 2 J/cm are introduced into the material in a layer
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