Gas ejection mechanism of glass structuring induced by nanosecond laser pulses
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Gas ejection mechanism of glass structuring induced by nanosecond laser pulses N. Nedyalkov1 · Ro Nikov1 · M. Koleva1 · N. Stankova1 · L. Aleksandrov2 · R. Iordanova2 Received: 10 April 2020 / Accepted: 1 September 2020 © Springer-Verlag GmbH Germany, part of Springer Nature 2020
Abstract In this work, results on a new laser-induced mechanism of microstructures formation on the surface of borosilicate glass are presented. The samples are fabricated by melt quenching method and consist of 50% S iO2, 20% A l2O3, 20% B 2O3, 5% CaO, 2% Li2O, 3% MgO (in wt.%). Irradiation at 266 nm delivered by Nd:YAG nanosecond system is used to modify the glass surface. It is found that this processing may result in the formation of voids in the irradiated area that have submicron mean diameter. The effect is observed at fluences below the ablation threshold. Different laser fluences and pulse number are applied to estimate their role on the induced surface morphology. It is observed that voids are also observed in the remaining material after ablation of the irradiated zone at high fluences. In this regime, glass structure modifications can also be observed under the glass surface at depths that may reach 100 µm. Based on measurements by differential thermal analysis equipped by mass spectrometer is concluded that the void formation is related to emission of gas phase from the glass induced by the laser heating. Keywords Laser processing of glass · Surface structuring · Hole formation
1 Introduction Glass is one of the most used material nowadays with well-established fabrication methods and properties [1, 2]. It is a base substance in areas from our daily life to modern applications as design of novel luminescent and lasing sources, photonic lab on a chip systems, and nonlinear optical elements [3–6]. On the basis of its complex composition and structure, a broad range of different glass types can be fabricated each offering specific properties [7, 8]. As most of the glasses are transparent in the visible spectra range, they are often used for cheap optical elements, transparent covers of active elements as in solar cells, light emitting diodes and flat screens. Glass material can also be applied in components in MEMS [9]. In these applications, an important issue is the structuring of the * N. Nedyalkov [email protected] 1
Institute of Electronics, Bulgarian Academy of Sciences, Tzarigradsko shousse 72, Sofia 1784, Bulgaria
Institute of General and Inorganic Chemistry, Bulgarian Academy of Sciences, Acad. Georgi Bonchev str. bld.11, 1113 Sofia, Bulgaria
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glass surface. In a controlled manner, it can lead to desired scattering efficiency, which could be applied for example, to increase the light emission from optical elements. It is found that fabrication of randomly distributed holes in glass may enhance the material transparency, an effect that can be used in solar cells [10]. The surface modifications are also desired for tribology applications [11] and microfluidic systems, where the surface roughness can con
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