Rapid Prototyping of Glass Microfluidic Devices using Femtosecond Laser Pulses
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Rapid Prototyping of Glass Microfluidic Devices using Femtosecond Laser Pulses Myung-Il Park, Jun Rye Choi1, Mira Park2, Dae Sik Choi1, Sae Chae Jeoung1, and Chong-Ook Park Department of Material Science and Engineering, Korea Advanced Institute of Science and Technology, 373-1 Kusong-dong, Yuseong-gu, Daejeon, Republic of Korea 1 Laser Metrology Laboratory, Korea Research Institute of Standards and Science, POB 102 Yuseong-gu, Daejeon, Republic of Korea 2 National Creative Research Initiatives Center for Ultrafast Optical Characteristics Control & Department of Chemistry, Yonsei University, Seoul 120-749, Republic of Korea ABSTRACT Laser micromachining technology with 150 femtosecond pulses is developed to fabricate glass microfluidic devices. A short theoretical analysis of femtosecond laser ablation is reported to characterize the femtosecond laser micromachining. The ablated crater diameter is measured as a function of the number of laser pulses as well as laser fluence. Two different ablation regimes are observed and the transition between the regimes is dependent on both the laser fluence and the number of laser shots. Based on the ablation phenomena described, microfluidic devices are fabricated with commercially available soda lime glasses (76 mm × 26 mm × 1 mm, Knittel Glaser, Germany). In addition to a microchannel for microfluidics, the capillary as well as optical fiber for detecting is integrated on the same substrate. The substrate is successively packaged with a lid slide glass by a thermal direct bonding. The presented developments are suitable for fast turn-around design cycle and inexpensive procedure, which provide rapid prototyping of MEMS devices.
INTRODUCTION Micro-electro-mechanical system (MEMS) devices are usually fabricated by lithographybased technologies. This is well applicable for large-scale manufacturing, when the costs of expensive and time-consuming mask technologies are minimized per unit by batch processing. However, many MEMS are not produced in large-scale manufacture. Small lot production required an alternative fabrication method with reduced cost. Still lacking sufficient modeling tools for many micromechanical applications, e.g., microfluidics and microtribology, redesigns of micro components are often inevitable. To save time and expenses in the development of
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Microsystems with several redesigns, a low-cost technology for rapid prototyping is necessary. Direct laser writing is a flexible and effective tool with low operating cost. It is well established for a variety of application s in mechanical engineering and appears to be suitable for microtechnolgy, too. However, Nd:YAG solid-state laser with femtosecond pulse duration has not been an aim of systematic research for micromechanical applications yet. EXPERIMENTAL The detailed description of the fs Ti: sapphire laser system employed in this work was given elsewhere [1]. The femtosecond pulses were generated by a regenerative amplified Ti:sapphire laser (Quantronics, USA), which provided pulse energy of
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