Growth and Transport in Nanostructured Materials Reactive Transport
This book will address the application of gas phase thin film methods, including techniques such as evaporation, sputtering, CVD, and ALD to the synthesis of materials on nanostructured and high aspect-ratio high surface area materials. We have chosen to
- PDF / 3,217,040 Bytes
- 135 Pages / 439.37 x 666.142 pts Page_size
- 75 Downloads / 281 Views
Angel Yanguas-Gil
Growth and Transport in Nanostructured Materials Reactive Transport in PVD, CVD, and ALD 123
SpringerBriefs in Materials
The SpringerBriefs Series in Materials presents highly relevant, concise monographs on a wide range of topics covering fundamental advances and new applications in the field. Areas of interest include topical information on innovative, structural and functional materials and composites as well as fundamental principles, physical properties, materials theory and design. SpringerBriefs present succinct summaries of cutting-edge research and practical applications across a wide spectrum of fields. Featuring compact volumes of 50 to 125 pages, the series covers a range of content from professional to academic. Typical topics might include: • A timely report of state-of-the-art analytical techniques • A bridge between new research results, as published in journal articles, and a contextual literature review • A snapshot of a hot or emerging topic • An in-depth case study or clinical example • A presentation of core concepts that students must understand in order to make independent contributions Briefs are characterized by fast, global electronic dissemination, standard publishing contracts, standardized manuscript preparation and formatting guidelines, and expedited production schedules.
More information about this series at http://www.springer.com/series/10111
Angel Yanguas-Gil
Growth and Transport in Nanostructured Materials Reactive Transport in PVD, CVD, and ALD
123
Angel Yanguas-Gil Northwestern-Argonne Institute of Science and Engineering Northwestern University Evanston, IL USA
ISSN 2192-1091 SpringerBriefs in Materials ISBN 978-3-319-24670-3 DOI 10.1007/978-3-319-24672-7
ISSN 2192-1105
(electronic)
ISBN 978-3-319-24672-7
(eBook)
Library of Congress Control Number: 2016953644 © The Author(s) 2017 This work is subject to copyright. All rights are reserved by the Publisher, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilms or in any other physical way, and transmission or information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed. The use of general descriptive names, registered names, trademarks, service marks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. The publisher, the authors and the editors are safe to assume that the advice and information in this book are believed to be true and accurate at the date of publication. Neither the publisher nor the authors or the editors give a warranty, express or implied, with respect to the material contained herein or for any errors or omissions that may have been made. Printed on acid-free paper This Springer imprint is published by Springer Nature
Data Loading...