High-Quality AlGaN/GaN HFET Structures Grown by MOCVD Using Intermediate High Temperature AlGaN/GaN Superlattices

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High-Quality AlGaN/GaN HFET Structures Grown by MOCVD Using Intermediate High Temperature AlGaN/GaN Superlattices Alexander Demchuk, Don Olson, Minseub Shin, Dan Olson, Peter Nussbaum, Andy Strom1, Simon Bates2, Frank Hofmann2, and Gordon Munns APA Optics, Inc., 2950 NE 84th Lane, Blaine, MN 55449, U.S.A. 1 now with Hysitron, Inc., 5251 W. 73rd Street, Minneapolis, MN 55439 2 Bede Scientific, 14 Inverness Drive East, Suite –100, Englewood, CO 80112, U.S.A. ABSTRACT We report on device quality Al0.28Ga0.72N/GaN heterostructures growth by low-pressure metalorganic chemical vapor deposition (LP-MOCVD) using intermediate AlxGa1-xN/GaN superlattices (SL) with x