Improvement of seed layer smoothness for epitaxial growth on porous silicon
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Improvement of seed layer smoothness for epitaxial growth on porous silicon Martini R. 1,2, Sivaramakrishnan Radhakrishnan H. 1,2, Depauw V. 2, Van Nieuwenhuysen K. 2, Gordon I. 2, Gonzalez M. 2, Poortmans J.1,2 1
KU Leuven - Department of Electrical Engineering, Kasteelpark Arenberg 10, 3001 Leuven, Belgium 2 Imec, Kapeldreef 75, 3001 Leuven, Belgium ABSTRACT In the last decades many techniques have been proposed to manufacture thin (
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