Influence of a piezoelectric ZnO intermediate layer on Rayleigh waves propagating in Sc 43% AlN 57% /ZnO/diamond hetero-
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Influence of a piezoelectric ZnO intermediate layer on Rayleigh waves propagating in Sc43% AlN57% /ZnO/diamond hetero-structures subjected to uniaxial stress Cherif Othmani1, Lazhar Labiadh4 , Chaofeng Lü1,2,3,a , Ali Reza Kamali4,5 , Farid Takali6,7 1 College of Civil Engineering and Architecture, Zhejiang University, Hangzhou 310058, China 2 Key Laboratory of Soft Machines and Smart Devices of Zhejiang Province, 3 4 5 6 7
Zhejiang University, Hangzhou 310027, China Soft Matter Research Center, Zhejiang University, Hangzhou 310027, China Energy and Enironmental Materials Research Centre (E2MC), School of Metallurgy, Northeastern University, Shenyang 110819, China Department of Materials Science and Metallurgy, University of Cambridge, 27 Charles Babbage Rd, Cambridge CB3 0FS, UK Faculty of Sciences of Sfax, Laboratory of Physics of Materials, University of Sfax, PB 815, 3018 Sfax, Tunisia National School of Engineers of Sfax (ENIS), Street Soukra Km 4, 3018 Sfax, Tunisia
Received: 2 July 2020 / Accepted: 2 November 2020 © Società Italiana di Fisica and Springer-Verlag GmbH Germany, part of Springer Nature 2020
Abstract Surface acoustic waves (SAWs) are of practical importance across several fields. Particularly, a wide range of SAW devices is available, which are based on the stacking piezoelectric layered hetero-structures. As such, efficient and stable algorithm of analyzing electromechanical coupling factor (K 2 ) should be of specific interest, inspiring a variety of piezoelectric layered structures. Motivated by the above considerations, this paper exploits the performance of Sc43% AlN57% /ZnO/diamond piezoelectric hetero-structures using matrix and polynomial methods. Consequently, dispersion curves, the electromechanical coupling factor and profiles of Rayleigh waves are calculated, in which the properties of hexago¯ ¯ − [0001]ZnO nal intermediate ZnO layer are varied. Here, (0001) − [1010]ZnO or (1120) directions of the middle layer were integrated with Sc43% AlN57% /diamond to be a composite hetero-structure with a larger K 2 of SAW. Accordingly, a commercial ZnO specimen was characterized by scanning electron microscopy (SEM) as well as Raman and XRD spectroscopy to determine its available crystallographic directions and the C-axis hexagonal character. Comparing with conventional AlN/diamond hetero-structures, the inclusion of ZnO as the intermediate layer provides with an excellent electromechanical coupling factor ¯ − [0001] structure. However, comparing with the which significantly improves the (1120) ZnO/diamond hetero-structure, a high phase velocity (V ph ) was observed. Therefore, the development of a well-balanced structure that maximizes the values of V ph and K 2 is systematically challenging. Moreover, it was found that initial stresses have a significant effect on the Rayleigh wave velocities. Fundamental A0 Lamb mode can be generated in piezoelectric hetero-structures when the properties of substrate remain very low relative to the film.
a e-mail: [email protected] (corresponding author)
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