Ink-jet printing of ferroelectric poly(vinylidene fluoride-trifluoroethylene) copolymers
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0889-W05-02.1
Ink-jet printing of ferroelectric poly(vinylidene fluoride-trifluoroethylene) copolymers Shihai Zhang,* Ziqi Liang, Qing Wang, Q. M. Zhanga) 1
Materials Research Institute, 2Department of Materials Science and Engineering, and 3 Department of Electrical Engineering The Pennsylvania State University, University Park, PA 16802 (USA)
a)
Corresponding author:
Professor Q. M. Zhang Penn State University, 187 MRL Building, University Park, PA 16802 Email: [email protected]; Phone: 814-8638994; Fax: 814-8637846
* Current address: GE Global Research Center, One Research Circle, K1-2S86D, Niskayuna, NY 12309. [email protected] Keywords: ink-jet printing, ferroelectric, polymer
0889-W05-02.2
Abstract Poly(vinylidene fluoride-trifluoroethylene) [P(VDF-TrFE)] copolymers are well known for their excellent ferroelectric and other related properties and they are being exploited as active components in many microdevices such as ferroelectric memory cells and infrared sensors. Compared with conventional photolithography, ink-jet printing provides a low-cost versatile method to fabricate polymer micro-devices. In this paper, the influences of driving waveform at the jet head, ink concentration, substrate chemistry, and the solvent quality on the printed P(VDF-TrFE) dots were investigated. It was found that well-defined P(VDF-TrFE) micro-dots with diameter of less than 30 µm and thickness of ~1 µm can be printed by using a mixed solvent system, consisting of a good solvent with relatively low boiling temperature and a poor solvent with high boiling temperature, on perfluorinated hydrophobic gold surface. The printed P(VDFTrFE) micro-dots possess crystallinity comparable to that of the bulk sample, suggesting that ink-jet printing technology is a promising micro-fabrication technology for manufacturing P(VDF-TrFE)-based micro-sensors and other micro-devices.
0889-W05-02.3
I. INTRODUCTION Poly(vinylidene fluoride-trifluoroethylene) (P(VDF-TrFE)) copolymers exhibit many interesting electronic properties which are attractive for a variety of applications such as microsensors and microactuators in micro-electro-mechanical-systems (MEMS), pyroelectric imaging sensors, data storage and memory devices, as well as gate dielectrics. 1,2,3 Although the conventional photolithography technologies can be and has been used for fabricating these micro-devices, the polymer nature of this class of electronic materials make it possible and attractive to use non-photolithographic techniques for the microdevice fabrication, which can be low cost and more compatible with organic based microelectronics and microdevices.4 Among various techniques investigated, the ink-jet micro-printing (IJMP) is especially attractive. IJMP has been widely used to directly deposit minute quantities of functional polymers and biological molecules onto desired positions for the many microdevice fabrications, including multicolor polymer light-emitting diodes, polymer thin film transistors, micro-actuators, waveguides, micro-lenses, and micro-sensors,
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