Inorganic-organic hybrid materials for polymer electronic applications
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H7.4.1
Inorganic-organic hybrid materials for polymer electronic applications R. Houbertz*, J. Schulz, L. Fröhlich, G. Domann, and M. Popall, Fraunhofer Institute for Silicate Research ISC, Neunerplatz 2, 97082 Würzburg, Germany
Registered trademark of Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. in Germany *to whom correspondence should be addressed
Abstract For applications in polymer electronics, suitable passivation coatings are searched for. Inorganic-organic hybrid polymers (ORMOCERs) have proven to be tunable in a wide range with respect to their physical properties. Their synthesis can be controlled such that the resulting materials show very low water vapor transition rates (WVTR) which is one of the most important key properties for passivation applications. Besides, ORMOCERs can be patterned by UV lithography due to their organic functional groups thus yielding the possibility of selectively passivate electronic circuits. Typical WVTR values which have been achieved so far for individual thin-film layers range between approximately 1 and 5 g/m2d (calculated for 100 µm layer thickness). The passivation properties will be discussed with respect to variations of the inorganic content and to the network formed upon processing.
Introduction During the last years, much attention has been attracted by organic electronics [1-3]. Particularly organic field effect transistors (OFETs) are a topic of intensive investigations. Due to the relatively high sensitivity of organic functional layers with respect to diffusion of, e.g., water, organic integrated circuits have to be protected using suitable barrier coatings. Driven by the diversity of applications, the need for selective passivation materials of electronic circuits was generated. Particularly, materials are searched for which directly can be patterned on top of integrated circuits (ICs) and thus can be simply introduced even into complex devices. Inorganic-organic hybrid polymers (ORMOCERs) have attracted considerable attention for application in polymer electronics due to several aspects [4-6]. First, their material properties can be tuned over a wide range towards the needs of the respective applications, not only by varying the synthesis conditions but also by varying kind and concentrations of initiators (UV and/or thermal initiators as well as thermal hardeners) involved in processing. Second, they can be patterned by conventional UV lithography and different printing techniques due to their hybrid nature. They consist of organically functionalized inorganic-oxidic units, whereas the organic groups can be methacryl, styryl and/or expoxy functionalities. Third, they can act as thin-film passivation and as adhesion promoter for other encapsulation materials envolved in component fabrication such as classical thick-film or epoxy or polyurethane encapsulation. The paper describes the systematic variation of composition of the inorganic content and the organic functionalities in order to produce UV patternable hybrid polymers
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