Inorganic-Organic Hybrid Polymers as Photo-Patternable Dielectrics for Multilayer Microwave Circuits
- PDF / 279,704 Bytes
- 6 Pages / 612 x 792 pts (letter) Page_size
- 100 Downloads / 159 Views
Inorganic-Organic Hybrid Polymers as Photo-Patternable Dielectrics for Multilayer Microwave Circuits L. Fröhlich#, R. Houbertz, S. Jacob, M. Popall, R. Mueller-Fiedler1, J. Graf1, M. Munk2 and H. von Zychlinski3 Fraunhofer-Institut für Silicatforschung Würzburg, Neunerplatz 2, D-97082 Würzburg, Germany 1 Robert Bosch GmbH, Robert-Bosch-Platz 1, D-70839 Gerlingen-Schillerhöhe, Germany 2 Marconi Communications GmbH, Gerberstrasse 33, D-71522 Backnang, Germany 3 UnaveraChemLab, Am Ländbach 20, D-82481 Mittenwald, Germany #
To whom correspondence should be addressed. Registered trademark of the Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., in Germany. ABSTRACT Inorganic–organic hybrid polymers (ORMOCERs) combine very good optical and dielectric properties in the frequency range up to 1 MHz (εr = 3.1 and tanδ = 0.004, both at 1 MHz). This is particularly promising for electro-optical (e/o) applications. Multi-layer microwave circuits for high frequency applications up to 100 GHz demand extraordinary material properties such as a low permittivity εr < 3 and a dielectric loss tanδ of about 10-3. For low-cost processing, direct UV patterning would be particularly advantageous. Additionally, the material should be thermally stable at least up to temperatures around 300 °C. We have developed a series of novel ORMOCER materials for high frequency applications. Using these ORMOCERs, thick film coatings (up to 150 µm) can be produced and directly patterned by UV lithography with sufficiently high resolution. The synthesis has been carried out using styrene-substituted organosilanes and silanediols as precursors reacted by simplified solgel-processing in combination with organic cross-linking of polymerizable organic functions. The materials have been characterized at high frequencies up to 40 GHz, exhibiting very promising dielectric properties of εr = 2.5 and tanδ = 0.0035. INTRODUCTION Over the past several decades, the skills of synthetic chemists have increased the availability of polymer materials with remarkable diversity of properties. There are well established applications for all kinds of polymers in electronics and optics. Beside the solely organic polymer materials, a new class of inorganic-organic hybrid polymer materials (ORMOCERs) has been developed, consisting of organically cross-linked inorganic oxidic units. These hybrid polymers combine already very good optical and dielectric properties in the lower high frequency region (εr = 3.1 and tanδ = 0.004 at 1 MHz), which is promising for electro-optical (e/o) applications [1]. Multi-layer microwave circuits for high frequency applications up to 100 GHz demand extraordinary material properties such as a low permittivity εr < 3 and a low dielectric loss tanδ of about 10-3, the latter of which is the most important quantity for this application. For low-cost Q11.4.1 Downloaded from https://www.cambridge.org/core. University of Arizona, on 19 Jul 2018 at 10:30:12, subject to the Cambridge Core terms of use, available at https://www.cambrid
Data Loading...
