Investigation of the effect of temperature on the structural, optical, electrical, and self-cleaning properties of ITO t
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Investigation of the effect of temperature on the structural, optical, electrical, and self‑cleaning properties of ITO thin films M. Yousefi1 · S. M. Rozati1,2 · N. Najafi2 Received: 16 March 2020 / Accepted: 1 June 2020 © Springer-Verlag GmbH Germany, part of Springer Nature 2020
Abstract Transparent conductive tin-doped indium oxide ( In2O3:Sn, ITO) thin films have been deposited onto glass substrate at different substrate temperatures by a simple and inexpensive method of air pressure chemical vapor deposition. The structural characteristics, and optical, electrical, and self-cleaning properties of the ITO thin films were investigated. It is clear that all films have a polycrystalline structure. In the sample synthesized at 550 °C, the preferred growth direction is in the direction of (222), but in the films synthesized at 450° and 500 °C, it is in the direction of (400). In the FESEM figures for all temperatures, the size of the nano-particles is less than 35 nm. In addition, all films have a relatively uniform surface. The analysis (EDX) was used to determine the chemical composition of these films. Transmission and reflection spectra of these films were examined in the 300–1000 nm spectral range and, for investigated films, the transmission coefficients in the visible regions exceed 80% and are weakly affected by deposition temperature. The optical band-gap values, Eg, ranged between 4.1 and 4.2 eV. In self-cleaning properties, the sample synthesized at 550 °C had the highest roughness and the highest contact angle and is a relatively good hydrophobic surface. Keywords ITO · APCVD · Physical properties · Self cleaning
1 Introduction Indium-tin-oxide (ITO) thin films have received a great deal of attention in several applications due to their interesting properties such as high transmittance in the visible region and unique electrical conductivity, originating from n-type semiconductor behavior with wide band gap between 3.5 and 4.3 eV [1, 2]. ITO thin films are primarily used as antireflective coatings and transparent conductive electrodes in the field of optical devices such as electroluminescence and liquid crystal displays (LCD), organic–inorganic lightemitting diodes [3], flat panel detectors [4], and solar cells [5]. The optical and electrical properties of these ITO films depend on their microstructure, stoichiometry, and impurity concentration. It also finds potential application in the engine oil degradation sensing monitoring systems and
* S. M. Rozati [email protected] 1
Department of Physics, University Campus, University of Guilan, Rasht, Iran
Physics Department, University of Guilan, Rasht, Iran
2
as a conductive substrate for the growth of metal–organic frameworks (MOFs) [6, 7]. However, the ITO films show an evident decline in transmittance in infrared range (k > 1200 nm), sensitivity in humid atmospheres, as well as in the high-temperature range, and are vulnerable in hydrogen plasma [8–10]. Surfaces that have the reversible wettability toward water are very important for
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