Magnetic properties study of spin pinned NiFe/FeMn/NiFe heterogeneous multilayer films with different NiFe thicknesses

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Magnetic properties study of spin pinned NiFe/FeMn/NiFe heterogeneous multilayer films with different NiFe thicknesses Yu Liu1 · Zhongwen Lan1 · Zhong Yu1 · Rongdi Guo1 · Xiaona Jiang1 · Chuanjian Wu1 · Ke Sun1 Received: 27 May 2020 / Accepted: 21 July 2020 © Springer-Verlag GmbH Germany, part of Springer Nature 2020

Abstract FM (ferromagnetic)/AF (antiferromagnetic) heterogeneous multilayer films, with high-saturation magnetization (4πMs), low coercivity (Hc), and low ferromagnetic resonance (FMR) linewidth (∆H), have great application prospects in microwave/millimeter-wave devices. In this study, the N ­ i81Fe19 (t nm)/Fe50Mn50 (15 nm)/Ni81Fe19 (t nm) films were fabricated by DC magnetron sputtering, and the effects of thickness of the ­Ni81Fe19 on the microstructure, static magnetic properties and microwave properties were investigated. With the increasing thickness of N ­ i81Fe19 film, the saturation magnetization increased from 658 to 754 emu/m3. The in-plane and out-of-plane coercivity both decreased first and then increased, and ∆H decreased first and then raised from 193 to 95 Oe. When the thickness of the Ni–Fe film is 50 nm, the transition of the out-of-plane exchange bias field from the negative exchange bias to the positive exchange bias occurred. Remarkably, with a 50 nm ­Ni81Fe19 film, the multilayer films achieved excellent performance with high-saturation magnetization (4πMs, 722 emu/m3), low in-plane coercivity (Hc, 0.61 Oe), and low FMR linewidth (∆H, 95 Oe). The outstanding heterogeneous multilayer films exhibit great potentials in microwave/millimeter-wave devices. Keywords  Nife/femn/NiFe trilayers · Magnetron sputtering · Surface morphology · Ferromagnetic resonance

1 Introduction Magnetic materials have attracted widespread attention as an important component of today’s microwave/millimeterwave devices, such as inductors, magnetic tunable filters, circulators, isolators, and phase shifters [1–5]. To meet the trend of miniaturization and high-frequency development, a large amount of research have focused on magnetic thinfilm materials including single and multilayer films [6–12]. Compared with traditional ferrite materials, such as YIG and NiZn, metal soft-magnetic materials have higher saturation magnetization, higher permeability and higher ferromagnetic resonance frequency, which have great application prospects in microwave/millimeter-wave devices. The frequency of ferromagnetic resonance determines the application frequency of devices, such as magnetic tunable filters [4,13–15]. To improve the working frequency of * Yu Liu [email protected] 1



School of Materials and Energy, University of Electronic Science and Technology of China, No.4, Section 2, North Jianshe Road, Chengdu 610054, China

devices, many scholars have focused on ferromagnetic (FM)/ antiferromagnetic (AF) multilayers [16–26]. Introducing antiferromagnetic materials to pin the metal ferromagnetic films for improving the effective anisotropic field of ferromagnetic materials through the exchange coupling between fe