Maskless Single-Sided Wet Etching Process for the Fabrication of Ultra-Low Distortion Polyimide Membranes | IBOOK.PUB

Maskless Single-Sided Wet Etching Process for the Fabrication of Ultra-Low Distortion Polyimide Membranes

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MASKLESS SINGLE-SIDED WET ETCHING PROCESS FOR THE FABRICATION OF ULTRA-LOW DISTORTION POLYIMIDE MEMBRANES M.L. SCHATIENBURG, R.I. FUENTES,* G. CZERNIENKO, R.C. FLEMING, AND J. PORTER Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA 02139. *Materials and Technologies Corporation, 341 Sheafe Road, Poughkeepsie, NY 12601. ABSTRACT A process for volume production of ultra-low distortion (

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