Matching mechanical response for a MEMS vibratory tuning fork gyroscope
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TECHNICAL PAPER
Matching mechanical response for a MEMS vibratory tuning fork gyroscope The Van Vu1
•
Dung Quang Tran1 • Trinh Duc Chu2
Received: 15 March 2020 / Accepted: 8 May 2020 Springer-Verlag GmbH Germany, part of Springer Nature 2020
Abstract This paper introduces the configuration of the MEMS tuning fork gyroscope with the connecting diamond-shaped frame to achieve the anti-phase mode in the driving direction. The connecting frame is an important element to compensate for the phase deviation in two major directions in case of appearing elements that cause the phase deviation in operating such as driving force, geometric error,… The matching phase between the two tines of the TFG with this configuration is 89% and 93.67% in the driving and sensing mode, respectively. Even, the phase compensation ability of the system reaches up to 95.6% in the driving mode with increasing the equivalent stiffness of the connecting frame to four times.
1 Introduction Based on the advancement of micro-electro-mechanical system (MEMS) technology, micro-machined vibratory gyroscopes (MVGs) has been becoming popular in technology science and real-life thanks to its advantages over traditional gyroscopes such as small size, light weight, and low power consumption (Yazdi et al. 1998; Dunzhu et al. 2014; Andrei 2006; Acar 2009; Andrei 1999). This device is a kind of micro-sensor used to detect and determine the angular velocity or rotational angle of a body into which the MVG is integrated. The MVG operates based on the ‘‘Coriolis effect’’ to transfer energy from the primary vibration to a secondary one (Acar 2009). These vibrations are in two perpendicular directions and called the driving and sensing direction respectively. Tuning fork gyroscope (TFG) is known as an anti-phase system with the purpose to cancel the common-mode inputs (Acar 2009). The TFG structure consists of two identical masses connected directly or indirectly by a mechanical frame. The masses are driven in opposite directions but along the same axis (anti-phase mode). When external angular velocity in the vertical axis is applied, the secondary motion of the masses occurs in
& The Van Vu [email protected] 1
Le Quy Don Technical University, Hanoi, Vietnam
2
Vietnam National University, Hanoi, Vietnam
opposite directions as well. This state increases significantly the performance of TFG (Apostolyuk and Tay 2005; Bumkyoo et al. 2008; Guan et al. 2016). However, the traditional MEMS tuning fork structure with the direct mechanical coupling between two tines likely causes an inphase vibratory mode (Guan et al. 2016), also could appear some errors in vibration (Yoon et al. 2012), (Weinberg and Kourepenis 2006). Therefore, TFG should be designed with the mechanical frame to guarantee the anti-phase mode in both the driving and sensing direction. The mechanical frame connecting indirectly two tines in the TFG were designed in a diamond-shaped frame (Guan et al. 2016a, b), a U-shaped bar (Guan et al. 2014), a lo
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