MEMS Vibratory Gyroscopes Structural Approaches to Improve Robustnes
MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environ
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MEMS Reference Shelf Series Editors: Stephen D. Senturia Professor of Electrical Engineering, Emeritus Massachusetts Institute of Technology Cambridge, Massachusetts
Roger T. Howe Department of Electrical Engineering Stanford University Stanford, California
Antonio J. Ricco Small Satellite Division NASA Ames Research Center Moffett Field, California
MEMS Vibratory Gyroscopes Structural Approaches to Improve Robustness Cenk Acar and Andrei Shkel ISBN: 978-0-387-09535-6 BioNanoFluidic MEMS Peter Hesketh, ed.
ISBN 978-0-387-46281-3 Microfluidic Technologies for Miniaturized Analysis Systems
Edited by Steffen Hardt and Friedhelm Schöenfeld, eds. ISBN 978-0-387-28597-9
Forthcoming Titles Self-assembly from Nano to Milli Scales Karl F. Böhringer ISBN 978-0-387-30062-7 Photonic Microsystems Olav Solgaard ISBN 978-0-387-29022-5 Micro Electro Mechanical Systems: A Design Approach Kanakasabapathi Subramanian ISBN 978-0-387-32476-0 Experimental Characterization Techniques for Micro-Nanoscale Devices Kimberly L. Turner and Peter G. Hartwell ISBN 978-0-387-30862-3 Microelectroacoustics: Sensing and Actuation Mark Sheplak and Peter V. Loeppert ISBN 978-0-387-32471-5 Inertial Microsensors Andrei M. Shkel ISBN 978-0-387-35540-5
Cenk Acar and Andrei Shkel
MEMS Vibratory Gyroscopes Structural Approaches to Improve Robustness
Cenk Acar Systron Donner Automotive 2700 Systron Drive Concord, CA 94518-1399 Andrei Shkel University of California, Irvine Dept. of Mechanical and Aerospace Engineering 4200 Engineering Gateway Building Irvine, CA 92697-3975
Library of Congress Control Number: 2008932165
ISBN 978-0-387-09535-6
e-ISBN 978-0-387-09536-3
Printed on acid-free paper. © 2009 Springer Science+Business Media, LLC All rights reserved. This work may not be translated or copied in whole or in part without the written permission of the publisher (Springer Science+Business Media, LLC, 233 Spring Street, New York, NY 10013, USA), except for brief excerpts in connection with reviews or scholarly analysis. Use in connection with any form of information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed is forbidden. The use in this publication of trade names, trademarks, service marks and similar terms, even if they are not identified as such, is not to be taken as an expression of opinion as to whether or not they are subject to proprietary rights. Printed on acid-free paper. 9 8 7 6 5 4 3 2 1 springer.com
To my beloved wife S¸ebnem Acar, and my dear parents.
Preface
Merging electrical and mechanical systems at a micro scale, Microelectromechanical Systems (MEMS) technology has revolutionized inertial sensors. Since the first demonstration of a micromachined gyroscope by the Draper Laboratory in 1991, various micromachined gyroscope designs fabricated in surface micromachining, bulk micromachining, hybrid surface-bulk micromachining technologies or alternative fabrication techniques have been reported. Inspired by the promising success
