Materials, Fabrication and Characterization Methods

Recently, advancing fabrication technologies enabled the realization of ring resonators in many material systems with excellent optical properties. In this chapter ring resonators made of different materials using corresponding manufacturing processes wil

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Dominik Gerhard Rabus Cinzia Sada

Integrated Ring Resonators A Compendium Second Edition

Springer Series in Optical Sciences Volume 127

Founding Editor H.K.V. Lotsch, Nußloch, Baden-Württemberg, Germany Editor-in-Chief William T. Rhodes, Florida Atlantic University, Boca Raton, FL, USA Series Editors Ali Adibi, School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA Toshimitsu Asakura, Toyohira-ku, Hokkai-Gakuen University, Sapporo, Hokkaido, Japan Theodor W. Hänsch, Max Planck Institute of Quantum Optics, Garching b. München, Bayern, Germany Ferenc Krausz, Max Planck Institute of Quantum Optics, Garching b. München, Bayern, Germany Barry R. Masters, Cambridge, MA, USA Katsumi Midorikawa, Laser Tech Lab, RIKEN Advanced Science Institute, Saitama, Japan Herbert Venghaus, Fraunhofer Institute for Telecommunications, Berlin, Germany Horst Weber, Berlin, Germany Harald Weinfurter, München, Germany Kazuya Kobayashi, Department of EECE, Chuo University, Bunkyo-ku, Tokyo, Japan Vadim Markel, Department of Radiology, University of Pennsylvania, Philadelphia, PA, USA

Springer Series in Optical Sciences is led by Editor-in-Chief William T. Rhodes, Florida Atlantic University, USA, and provides an expanding selection of research monographs in all major areas of optics: • • • • • • • •

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Dominik Gerhard Rabus Cinzia Sada •

Integrated Ring Resonators A Compendium Second Edition

With 328 Figures and 15 Tables

123

Dominik Gerhard Rabus Department of Applied Chemistry, Process Analysis and Technology (PA&T) Reutlingen University Reutlingen, Germany

Cinzia Sada Department of Physics and Astronomy “Galileo Galilei” University of Padova Padua, Italy

ISSN 0342-4111 ISSN 1556-1534 (electronic) Springer Series in Optical Sciences ISBN 978-3-030-60130-0 ISBN 978-3-030-60131-7 (eBook) https://doi.org/10.1007/978-3-030-60131-7 1st edition: © Springer-Verlag Berlin Heidelberg 2007 2nd edition: © Springer Nature Switzerland AG 2020 This work is subject to copyright. All rights are reserved by the Publisher, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilms or in any other physical way, and transmission or information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed. The use of general descriptive names, registered names, trademarks, service marks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the r