Measurements and Modeling of Two-phase Flow in Microchannels

While the modeling and optimization of single-phase liquid microchannel heat sinks have been extensively studied [2.11–2.14, 4.1–4.3], the more complicated physics of boiling flow in microchannels is relatively poorly understood. Unlike in the single-phas

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MICROTECHNOLOGY AND MEMS Series Editor: H. Baltes D. Liepmann The series Microtechnology and MEMS comprises text books, monographs, and state-of-the-art reports in the very active field of microsystems and microtechnology. Written by leading physicists and engineers, the books describe the basic science, device design, and applications. Theywill appeal to researchers, engineers, and advanced students. Mechanical Microsensors By M. Elwenspoek and R. Wiegerink CMOS Cantilever Sensor Systems Atomic Force Microscopy and Gas Sensing Applications By D. Lange, O. Brand, and H. Baltes Micromachines as Tools for Nanotechnology Editor: H. Fujita Modelling of Microfabrication Systems By R. Nassar and W. Dai Laser Diode Microsystems ByH.Zappe Silicon Microchannel Heat Sinks Theories and Phenomena By L. Zhang, K.E. Goodson, and T.W. Kenny

L.Zhang K.E. Goodson T.W. Kenny

Silicon Microchannel Heat Sinks Theories and Phenomena With 106 Figures

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Springer

Dr. Lian Zhang

Professor Thomas W. Kenny

Molecular Nanosystems 977 Commercial Street Palo Alto, CA 94303 USA Email: [email protected]

Stanford University Department of Mechanical Engineering Terman54° Stanford, CA 94305 USA Email: [email protected]

Professor Kenneth E. Goodson Stanford University Department of Mechanical Engineering Building 500, Room 500S Stanford, CA 94305 USA Email: [email protected]

Series Editors: Professor Dr. H. Baltes ETH Ztirich, Physical Electronics Laboratory ETH Hoenggerberg, HPT-H6, 8093 Ztirich, Switzerland

Professor Dr. Hiroyuki Fujita University of Tokyo, Institute of Industrial Science 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan

Professor Dr. Dorian Liepmann University of California, Department of Bioengineering 466 Evans Hall, #1762, Berkeley, CA 94720-1762, USA ISSN 1439-6599 ISBN 978-3-642-07282-6 ISBN 978-3-662-09899-8 (eBook) DOI 10.1007/978-3-662-09899-8 Cataloging·in-Publication Data applied for. Bibliographic information published by Die Deutsche Bibliothek Die Deutsche Bibliothek lists this publicat ion in the Deutsche Nationalbibliografie; detailed bibliographic data is available in the Internet at http://dnb.ddb.de. This work is subject to copyright. AU rights are reserved, whether the whole or part of the material is concerned, specificaUy the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilm or in any other way, and storage in data banks. Duplication of this publication or parts thereof is permitted only under the provisions of the German Copyright Law of September 9, 1965, in its current version, and permis sion for use must always be obtained from Springer-Verlag Berlin Heidelberg GmbH. Violations are liable for prosecution under the German Copyright Law. springeronline.com © Springer-Verlag Berlin Heidelberg

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