Mechanical Properties of Evaporated Gold Films. Hard Substrate Effect Correction
- PDF / 131,177 Bytes
- 6 Pages / 595 x 842 pts (A4) Page_size
- 3 Downloads / 247 Views
1086-U08-41
Mechanical Properties of Evaporated Gold Films. Hard Substrate Effect Correction Ke Du1, Xiaolu Pang1,2, Chi Chen1, and Alex A. Volinsky1 1 Department of Mechanical Engineering, University of South Florida, 4202 E Fowler Ave. ENB118, Tampa, FL, 33620 2 Department of Material Physics and Chemistry, University of Science and Technology, Beijing, Beijing, 100083, China, People's Republic of Abstract Nanoindentation tests using the Berkovich indenter tip were performed on 50 and 200 nm thick polycrystalline gold films deposited on hard substrates. Gold film hardness increased with the indentation depth due to the influence of the substrate. A procedure based on the Joslin-Oliver method was introduced to correct for the substrate effect. The method utilizes the fact that the measured elastic modulus did not change significantly with the indentation depth for the two films tested, which allowed reducing the contact area variation used in the hardness calculation. Introduction The ability to measure mechanical properties of thin films is important for various applications. Typically thin films have higher hardness compared with their bulk counterparts. There are many methods used for measuring thin films mechanical properties, which utilize different sample geometries, including freestanding films [1], microbridge [2], and microbeam cantilever beam [3] to name a few. However, nanoindentation is the most commonly used method for measuring mechanical properties. When indenting bulk polycrystalline samples their hardness and modulus do not change significantly with indentation depth, however, for thin films, the elastic modulus typically changes a lot at very shallow indentations (
Data Loading...
