MEMS-based dual temperature control measurement method for thermoelectric properties of individual nanowires

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Research Letter

MEMS-based dual temperature control measurement method for thermoelectric properties of individual nanowires Yan Cui, Key Laboratory for Advanced Materials and Feringa Nobel Prize Scientist Joint Research Center, Institute of Fine Chemicals, School of Chemistry and Molecular Engineering, East China University of Science and Technology, Shanghai 200237, China Yang Yang, Science and Technology on Micro-system Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China Shuai Liu, College of Science, Xi’an Shiyou University, Xi’an, Shaanxi 710065, China Sheng Dai , Key Laboratory for Advanced Materials and Feringa Nobel Prize Scientist Joint Research Center, Institute of Fine Chemicals, School of Chemistry and Molecular Engineering, East China University of Science and Technology, Shanghai 200237, China Tie Li and Yuelin Wang, Science and Technology on Micro-system Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China Address all correspondence to Yan Cui at [email protected]; Yuelin Wang at [email protected] (Received 18 July 2020; accepted 20 August 2020)

Abstract The development of thermoelectric measurement technology at nanoscale is a challenging task. Here, a novel MEMS-based dual temperature control (DTC) measurement method for thermoelectric properties of individual nanowires was proposed. Different from conventional thermal bridge testing devices, this DTC thermoelectric testing device can obtain the thermoelectric properties by independently control ambient temperature and temperature difference between two ends of the nanowires through two separate resistance thermometers without auxiliary heating devices. The reliability of the model and the testing accuracy were verified by accurately measuring the thermal conductivity, electrical conductivity, and the absolute value of the Seebeck coefficient of VO2 nanowires.

Introduction Thermoelectric materials and devices convert thermal energy to electrical energy and vice versa, based on the Seebeck and Peltier effect, which is promising to relieve the current energy crisis. The improvement of the thermoelectric conversion efficiency relies on the high thermoelectric figure-of-merit ZT value (dimensionless) of materials, which was mainly determined by a high Seebeck coefficient and electrical conductivity, while low thermal conductivity. Thermoelectric properties of nanomaterials can show higher thermoelectric performance than bulks because of the enhanced phonon scattering and quantum confinement,[1–3] which opens up a new field for us to pursuing high thermoelectric conversion efficiency. Due to the intrinsic correlation between the Seebeck coefficient and thermal conductivity, thermoelectric conversion efficiency of nanomaterials was still difficult to improve at present. Accuracy and reliability of the measuring methods for thermoelectric properties of nanomaterials have always been the key issues to discover exce