MEMS/NEMS Devices and Applications
Microelectromechanical Systems (MEMS) have played key roles in many important areas, for example transportation, communication, automated manufacturing, environmental monitoring, health care, defense systems, and a wide range of consumer products. MEMS ar
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Microelectromechanical Systems (MEMS) have played key roles in many important areas, for example transportation, communication, automated manufacturing, environmental monitoring, health care, defense systems, and a wide range of consumer products. MEMS are inherently small, thus offering attractive characteristics such as reduced size, weight, and power dissipation and improved speed and precision compared to their macroscopic counterparts. Integrated circuits (IC) fabrication technology has been the primary enabling technology for MEMS besides a few special etching, bonding and assembly techniques. Microfabrication provides a powerful tool for batch processing and miniaturization of electromechanical devices and systems into a dimensional scale, which is not achievable by conventional machining techniques. As IC fabrication technology continues to scale toward deep sub-micron and nano-meter feature sizes, a variety of nanoelectromechanical systems (NEMS) can be envisioned in the foreseeable future. Nano-scale mechanical devices and systems integrated with nanoelectronics will open a vast number of new exploratory research areas in science and engineering. NEMS will most likely serve as an enabling technology merging engineering with the life sciences in ways that are not currently feasible with the micro-scale tools and technologies. MEMS has been applied to a wide range of fields. Over hundreds of micro-devices have been developed
MEMS Devices and Applications .............. 8.1.1 Pressure Sensor............................ 8.1.2 Inertial Sensor ............................. 8.1.3 Optical MEMS ............................... 8.1.4 RF MEMS......................................
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8.2 NEMS Devices and Applications .............. 246 8.3 Current Challenges and Future Trends .... 249 References .................................................. 250 for specific applications. It is thus difficult to provide an overview covering every aspect of the topic. In this chapter, key aspects of MEMS technology and application impacts are illustrated through selecting a few demonstrative device examples, which consist of pressure sensors, inertial sensors, optical and wireless communication devices. Microstructure examples with dimensions on the order of sub-micron are presented with fabrication technologies for future NEMS applications. Although MEMS has experienced significant growth over the past decade, many challenges still remain. In broad terms, these challenges can be grouped into three general categories; (1) fabrication challenges, (2) packaging challenges, and (3) application challenges. Challenges in these areas will, in large measure, determine the commercial success of a particular MEMS device both in technical and economic terms. This chapter presents a brief discussion of some of these challenges as well as possible approaches to address them.
munication, automated manufacturing, environmental monitoring, health care, defense systems, and a wide range of consumer products. MEMS are inherentl
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