Metal Contacts to n- Al x Ga 1-x N
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ABSTRACT In this paper we report on the formation of ohmic contacts to n- AlxGa1 .xN alloys. The films were produced by plasma-assisted MBE and doped n- type with silicon at doping levels between 1018 to 1019 cm-3 . Contacts were formed by sequential deposition of 200 A of Ti and 2000 A of Al and the contact resistivities were determined from TLM measurements. For low Al- content (x
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