Metal-containing diamond-like carbon-silicon nanocomposite films as temperature sensors
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Metal-containing diamond-like carbon-silicon nanocomposite films as temperature sensors T. Takeno, T. Takagi, A. Bozhko2 M. Shupegin3 and T. Sato Institute of Fluid Science, Tohoku University, Sendai 980-8577, Japan 2 Moscow State University, Physics Department, Moscow 119899, Russia, 3 Moscow Power Engineering Institute, Moscow 105835, Russia ABSTRACT Metal-carbon nanocomposites are characterized by a number of unique properties, perspective for the various-type applications. The presented experimental data on the conductivity of amorphous tungsten- and niobium-containing carbon-silicon nanocomposite films show the possibility of the design of advanced wide-range temperature sensors, which are expected to possess the chemical stability, biocompatibility, mechanical, and other properties typical for this class of materials. The films were deposited onto polycrystalline substrates using combination of PECVD(Plasma Enhanced Chemical Vapor Deposition) of siloxane vapors and magnetron co-sputtering of metal target. The conductivity σ of the films, measured using standard 4-probe technique in the temperature range 80-400K, is characterized by the gradual decrease with temperature. The experimental σ(T) dependences are well fitted by the universal power expression, σ(T)= σ0+aTn, where σ0, a, and n are the fitting parameters dependent on the value of metal concentration. The conductivity mechanisms in the investigated amorphous metalcontaining carbon-silicon nanocomposite films are discussed in the framework of the model of inelastic tunneling in amorphous insulators in the presence of the structural transformation in carbon-silicon matrix.
INTRODUCTION The hard forms of insulating amorphous carbon coatings are widely known as perspective protective coatings for numerous applications. It was shown that the properties of the films can be essentially modified by the additions of different elements during their deposition. E.g. the presence of Si in amorphous carbon matrix leads to the variation of the mechanical properties [1], while the metals are responsible both for the mechanical and electrophysical properties modifications [2]. The possibility to vary properties of the hard forms of amorphous carbon films can sufficiently extend the range of their industrial applications. In the presented paper the influence of metal concentration on the conductivity mechanisms of the amorphous carbon films, which contain transition metals, such as tungsten and niobium, and silicon, is studied. It is shown that the films of such type can be interesting candidates at the role of temperature sensors. It is expected that the sensors on the basis of these films will combine the promising mechanical properties and stability to different environmental conditions peculiar to the traditional hard amorphous carbon coatings combined with new functionality imparted by the presence of metal.
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EXPERIMENTAL DETAILS The investigated metal-carbon nanocomposite films were deposited onto dielectric polycrystalline substrates in the
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