Microdisk lasers on an erbium-doped lithium-niobite chip
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rch 2021 Vol. 64 No. 3: 234263 https://doi.org/10.1007/s11433-020-1637-8
Editor’s Focus
Editor’s Focus
Microdisk lasers on an erbium-doped lithium-niobite chip 1
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Qiang Luo , ZhenZhong Hao , Chen Yang , Ru Zhang , DaHuai Zheng , ShiGuo Liu , 1 1,2,3* 1* 1* 1* HongDe Liu , Fang Bo , YongFa Kong , GuoQuan Zhang , and JingJun Xu 1
MOE Key Laboratory of Weak-Light Nonlinear Photonics, TEDA Institute of Applied Physics and School of Physics,
Nankai University, Tianjin 300457, China; Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China; Collaborative Innovation Center of Light Manipulations and Applications, Shandong Normal University, Jinan 250358, China 2
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Received October 5, 2020; accepted October 31, 2020; published online December 2, 2020
Lithium niobate on insulator (LNOI) provides a platform for the fundamental physics investigations and practical applications of integrated photonics. However, as an indispensable building block of integrated photonics, lasers are in short supply. In this paper, erbium-doped LNOI laser in the 1550-nm band was demonstrated in microdisk cavities with high quality factors fabricated in batches by UV exposure, inductively coupled plasma reactive ion etching, and chemomechanical polishing. The threshold and conversion efficiency of the erbium-doped LNOI microdisk laser were measured to be lower than 1 mW and −5 6.5×10 %, respectively. This work will benefit the development of integrated photonics based on LNOI. lithium niobite, LNOI, microcavities, laser PACS number(s): 42.55.Sa, 42.55.Rz, 77.84.Bw, 77.55.+f Citation:
Q. Luo, Z. Z. Hao, C. Yang, R. Zhang, D. H. Zheng, S. G. Liu, H. D. Liu, F. Bo, Y. F. Kong, G. Q. Zhang, and J. J. Xu, Microdisk lasers on an erbiumdoped lithium-niobite chip, Sci. China-Phys. Mech. Astron. 64, 234263 (2021), https://doi.org/10.1007/s11433-020-1637-8
1 Introduction As an excellent optical crystal material, lithium niobate (LN) has advantages such as a small absorption coefficient −1 (0.02 cm at 1064 nm); wide transparent window (0.35-5 μm); high nonlinear coefficient (d33=−41.7 pm/V); and good electro-optic (r33=32.2 pm/V) [1], acousto-optic, and photorefractive effects. Benefiting from the commercial production of LN on insulator (LNOI), the research on LNOI integrated optical devices has increased explosively. For example, Lin et al. [2] fabricated the first LNOI microdisk cavity using femtosecond laser micromachining, followed by focused ion beam milling. Subsequently, an inductively *Corresponding authors (Fang Bo, email: [email protected]; YongFa Kong, email: [email protected]; GuoQuan Zhang, email: [email protected]; JingJun Xu, email: [email protected])
coupled plasma reactive ion etching (ICP-RIE) process was introduced to prepare LNOI microdisk cavity [3] and combined with photolithography to achieve batch production [4]. With the assistance of chemomechanical polishing (CMP), the quality (Q) factors of LNOI microdisk cavities have been 7 recently improved up to 10 [5,6], a
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