Microstructure and Oxidation Resistance of V Thin Films Deposited by Magnetron Sputtering at Room Temperature
- PDF / 1,425,439 Bytes
- 6 Pages / 595.276 x 841.89 pts (A4) Page_size
- 60 Downloads / 226 Views
879
https: //doi. org/10.1007/s11595-020-2333-2
Microstructure and Oxidation Resistance of V Thin Films Deposited by Magnetron Sputtering at Room Temperature ZHANG Song1, ZHANG Ziyu1, LI Jun2*, TU Rong1, SHEN Qiang1, WANG Chuanbin1, LUO Guoqiang1, ZHANG Lianmeng1
(1. State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China; 2. National Key Laboratory for Shock Wave and Detonation Physics, Institute of Fluid Physics, Mianyang 621900, China)
Abstract: Vanadium films were deposited on Si(100) substrates at room temperature by direct current (DC) magnetron sputtering. The microstructure and surface morphology were studied using scanning electron microscopy (SEM) and atomic force microscope (AFM). The oxidation resistance of films in air was studied using X-ray photoelectron spectroscopy (XPS) and transmission electron microscopy (TEM). The results showed that the amorphous vanadium film with a flatter surface had higher oxidation resistance than the crystalline film when exposed to atmosphere. The rapid formation of the thin oxide layer of amorphous vanadium film could protect the film from sustained oxidation, and the relative reasons were discussed. Key words: vanadium films; magnetron sputtering; sputtering power (Ps); microstructure; oxidation resistance
1 Introduction Vanadium films have been well studied and are used for many different applications in a variety of industries. In a nuclear reactor, vanadium and vanadium alloy (e g, V–4Ti–4Cr[1–3]) have been used as a selfcooled lithium/vanadium blanket[2] and low activation structural materials[3], owing to their low neutron crosssection, low long-term induced radioactivity level[4], and good compatibility with lithium [3]. The good resistance of vanadium to sulfuric and hydrochloric acids corrosion and its stabilities against alkalis, make it a good candidate for the protective layer of aluminum and aluminum alloys[5]. In comparison to other metals, vanadium is harder than most metals, which gives it a higher value as a protective layer. However, vanadium oxidizes even in ambient air[6] and the oxide layer will reduce the corrosion resistance of the vanadium film in © Wuhan University of Technology and Springer-Verlag GmbH Germany, Part of Springer Nature 2020 (Received: Apr. 29, 2019; Accepted: May 12, 2020) ZHANG Song(章嵩): Ph D; E-mail: [email protected] *Corresponding author: LI Jun(李俊): E-mail: [email protected] Funded by the Science Challenge Project (No.TZ2016001), the National Natural Science Foundation of China (Nos. 11602251, 51861145306 and 51872212), and the 111 Project (No.B13035), and Joint Fund of Ministry of Education for Pre-research of Equipment (No.6141A02022257). This research was also supported by the International Science & Technology Cooperation Program of China (Nos.2018YFE0103600, 2014DFA53090), the Technological Innovation of Hubei Province, China (No.2019AAA030).
an acidic environment[7], whilst decreasing the hardness of the film[6]. Metallic glasses have
Data Loading...
