Modeling and simulation of workpiece surface flatness in magnetorheological plane finishing processes
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ORIGINAL ARTICLE
Modeling and simulation of workpiece surface flatness in magnetorheological plane finishing processes Zhanbin Liu 1 & Jianyong Li 1 & Meng Nie 1 & Yueming Liu 1 Received: 4 May 2020 / Accepted: 15 October 2020 # Springer-Verlag London Ltd., part of Springer Nature 2020
Abstract Multi-pole arrangements in magnetorheological plane finishing technology have been investigated in this study. A method of combining the material removal mechanism of micro-points using the empirical Preston equation is proposed to establish a prediction model for surface flatness, and the new Semiconductor Equipment and Materials International (SEMI) standard has been used to evaluate workpiece surface flatness. Based on the model, the effects of process parameters (polishing time, speed ratio, translational amplitude, polishing gap, etc.) on the flatness of workpieces with different shapes are predicted through simulation, and the effects of multi-pole arrangements are explored. The results of the analysis indicate that with changes in process parameters, the extent of change in surface flatness differs based on the shape of the workpiece. After polishing, concave workpieces show the highest levels of surface flatness. From simulations of magnetic pole arrangements, it is also found that magnetic field generators with different magnetic pole arrangements can be used for workpieces with different shapes to improve their surface flatness. Experiments with a workpiece with its shape measured using a white light interferometer showed that the surface flatness improved from being 33.561 μm initially to 21.822 μm after polishing, thereby demonstrating the effectiveness of the proposed method. Keywords Magnetorheological plane finishing . Flatness . Process parameters . Multi-pole arrangement
1 Introduction In recent years, with the rapid development of precision manufacturing, the production and processing of workpieces is subject to increasingly strict requirements for surface quality control, which require surfaces to be of extremely high smoothness, cleanliness, and flatness [1–3]. Flat finishing is the final process of workpiece surface processing and is the key to determining the quality of the workpiece surface. Magnetorheological finishing (MRF) has proven to be an extremely effective technique for ultra-smooth and low-damage processing of workpieces. It relies mainly on the rheological properties of a magnetorheological fluid under the action of a magnetic field to carry abrasive particles that perform material removal [4–6]. The finishing medium of MRF is in flexible
* Meng Nie [email protected] 1
School of Mechanical, Electronic and Control Engineering, Beijing Jiaotong University, Beijing 100044, China
contact with the processed object. It is characterized by a low normal pressure, which does not easily cause surface and subsurface damages and can control the amount of material removed [7, 8]. It has been used to achieve precision finishing of non-magnetic materials, such as optical components, ceramic devices, s
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