Motion MEMS and Sensors, Today and Tomorrow
Only 6 years passed since the dawn of the Motion Sensors Era in the Consumer market and now the world of MEMS Motion Sensors is completely different and it’s going to change even more in the future. If 2006 was the year of the Accelerometer adoption by Ni
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Motion MEMS and Sensors, Today and Tomorrow Benedetto Vigna, E. Lasalandra, and T. Ungaretti
Abstract Only 6 years passed since the dawn of the Motion Sensors Era in the Consumer market and now the world of MEMS Motion Sensors is completely different and it’s going to change even more in the future. If 2006 was the year of the Accelerometer adoption by NintendoTM in the WiiTM Controller, 2010 was the year of the Gyroscope adoption by Smartphone manufacturers. And in both cases STMicroelectronics triggered the big volume production of those two micromachined devices, previously known only by automotive customers and used only for active and passive safety applications. Moreover nowadays combinations of these two inertial products, also known as Six Degree-Of-Freedom Motion Sensors 6XDOF, are starting to appear in the market and most likely they will coexist with standalone accelerometers and gyroscopes, depending on customer needs in terms of compactness and performances. This paper reports the details of an innovative tri-axis silicon MEMS Coriolis’ gyroscope that fulfills the pressing market requirements for low power consumption, small size, slim form factor, high performances and low cost, but it addresses also the recent trends of the Six DegreeOf-Freedom 6XDOF and Nine-Degree-of-Freedom 9XDOF systems, realized by integrating the 6XDOF with a compass.
7.1
Introduction
More intuitive user interface has been the key application driving the adoption of the Motion Sensors in the Mobile Phones and Remote Controllers, Personal Computers and Tablets, Games and Portable Multimedia Players. Image Stabilization, Context Awareness, Location Based Services and Remote Monitoring are the new emerging applications that will continue to drive the adoption
B. Vigna (*) • E. Lasalandra • T. Ungaretti STMicroelectronics s.r.l., Via Tolomeo 1, 20010 Cornaredo, MI, Italy e-mail: [email protected] A.H.M. van Roermund et al. (eds.), Nyquist AD Converters, Sensor Interfaces, 117 and Robustness: Advances in Analog Circuit Design, 2012, DOI 10.1007/978-1-4614-4587-6_7, # Springer Science+Business Media New York 2013
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of Motion Sensors in the market segments mentioned above as well in new ones, still unknown to most of the people. Linear motion detection is requested to be combined with angular rate sensing along pitch, yaw and roll axis in the space to address a wide range of applications where three to nine degree of freedom sensing feature is required. One example is related to Inertial Measurement Unit (IMU) or Inertial Navigation Unit (INU) where accelerometer and gyroscopes are each other complementary to detect linear and angular motion in several applications including image stabilization, enhanced user interface for mobile phones, games and pointers/remote controllers, pedestrian and car navigation for location based services and fitness/wellness people monitoring. As seen for the accelerometer standalone, once again size, performances and price are the driving factors for gyroscope and 6XDOF/9XD
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