Nanostructures - Fabrication and Analysis
The main theme of this book is the exploration the underlying physical laws that permit the fabrication of nanometer-scale structures. As researchers attempt to fabricate nanometer-scale structures which do not exist per se,&
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H. Nejo (Ed.)
Nanostructures – Fabrication and Analysis
NanoScience and Technology
NanoScience and Technology Series Editors: P. Avouris B. Bhushan D. Bimberg K. von Klitzing H. Sakaki R. Wiesendanger The series NanoScience and Technology is focused on the fascinating nano-world, mesoscopic physics, analysis with atomic resolution, nano and quantum-effect devices, nanomechanics and atomic-scale processes. All the basic aspects and technology-oriented developments in this emerging discipline are covered by comprehensive and timely books. The series constitutes a survey of the relevant special topics, which are presented by leading experts in the f ield. These books will appeal to researchers, engineers, and advanced students.
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Atomic Force Microscopy, Scanning Nearfield Optical Microscopy and Nanoscratching Application to Rough and Natural Surfaces By G. Kaupp
Applied Scanning Probe Methods I Editors: B. Bhushan, H. Fuchs, and S. Hosaka Nanostructures Theory and Modeling By C. Delerue and M. Lannoo Nanoscale Characterisation of Ferroelectric Materials Scanning Probe Microscopy Approach Editors: M. Alexe and A. Gruverman Magnetic Microscopy of Nanostructures Editors: H. Hopster and H.P. Oepen Silicon Quantum Integrated Circuits Silicon-Germanium Heterostructure Devices: Basics and Realisations By E. Kasper, D.J. Paul The Physics of Nanotubes Fundamentals of Theory, Optics and Transport Devices Editors: S.V. Rotkin and S. Subramoney
Applied Scanning Probe Methods II Scanning Probe Microscopy Techniques Editors: B. Bhushan, H. Fuchs Applied Scanning Probe Methods III Characterization Editors: B. Bhushan, H. Fuchs Applied Scanning Probe Methods IV Industrial Application Editors: B. Bhushan, H. Fuchs Nanocatalysis Editors: U. Heiz, U. Landman Roadmap 2005 of Scanning Probe Microscopy Editors: S. Morita Nanostructures Fabrication and Analysis Editor: H. Nejo
H. Nejo (Ed.)
Nanostructures Fabrication and Analysis
With 178 Figures and 3 in Color
123
Professor Hitoshi Nejo National Institute for Materials Science Tsukuba 305-0047, Japan E-mail: [email protected]
Series Editors: Professor Dr. Phaedon Avouris
Professor Dr., Dres. h.c. Klaus von Klitzing
IBM Research Division Nanometer Scale Science & Technology Thomas J. Watson Research Center P.O. Box 218 Yorktown Heights, NY 10598, USA
Max-Planck-Institut f¨ur Festk¨orperforschung Heisenbergstr. 1 70569 Stuttgart, Germany
Professor Dr. Bharat Bhushan
University of Tokyo Institute of Industrial Science 4-6-1 Komaba, Meguro-ku Tokyo 153-8505, Japan
Ohio State University Nanotribology Laboratory for Information Storage and MEMS/NEMS (NLIM) Suite 255, Ackerman Road 650 Columbus, Ohio 43210, USA
Professor Dr. Dieter Bimberg TU Berlin, Fakut¨at Mathematik/ Naturwissenschaften Institut f¨ur Festk¨orper
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