Nanosystems Design and Technology
DeMicheli, et. al., Nanosystems Design and Technology This book addresses the impact of nanotechnologies on the design of electronic systems. Coverage includes technologies ranging from nanoelectronics to sensing and micro/nanofluidics, and encompassing t
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Nanosystems Design and Technology 123
Nanosystems Design and Technology
Giovanni De Micheli • Yusuf Leblebici Martin Gijs • Janos V¨or¨os
Nanosystems Design and Technology
123
Prof. Dr. Giovanni De Micheli EPFL - Swiss Federal Institute of Technology Integrated Systems Lab 1015 Lausanne, Switzerland [email protected]
Prof. Dr. Martin Gijs EPFL - Swiss Federal Institute of Technology Microsystems Lab 1015 Lausanne, Switzerland [email protected]
Prof. Dr. Yusuf Leblebici EPFL - Swiss Federal Institute of Technology Microelectronic Systems Lab 1015 Lausanne, Switzerland Yusuf [email protected]
Prof. Dr. Janos V¨or¨os ETHZ - Swiss Federal Institute of Technology Inst. Biomedizinische Technik Gloriastrasse 35 - 8092 Z¨urich, Switzerland [email protected]
ISBN 978-1-4419-0254-2 e-ISBN 978-1-4419-0255-9 DOI 10.1007/978-1-4419-0255-9 Springer Dordrecht Heidelberg London New York Library of Congress Control Number: 2009926034 c Springer Science+Business Media, LLC 2009 This work is subject to copyright. All rights are reserved, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilm or in any other way, and storage in data banks. Duplication of this publication or parts thereof is permitted only under the provisions of the German Copyright Law of September 9, 1965, in its current version, and permission for use must always be obtained from Springer. Violations are liable to prosecution under the German Copyright Law. The use of general descriptive names, registered names, trademarks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. Printed on acid-free paper Springer is part of Springer Science+Business Media (www.springer.com)
Foreword
It is a great pleasure to write for this book, which largely presents research funded by the Competence Centre for Materials Science (CCMX) of the Swiss Federal Institutes of Technology (ETH domain). CCMX was created in early 2006 with the aim of networking research groups within the ETH domain and interfacing to the research needs of Swiss industry. Materials science and technology is a transversal subject that addresses the diverse materials used in many different industrial sectors; thus CCMX focuses on several sectors of present and future economic importance including Materials for Micro- and Nanosystems (MMNS) with Giovanni De Micheli as director. CCMX has provided a new funding model with several research teams working together on interdisciplinary projects. MMNS took up this model of cooperative engineering to initiate three large projects, namely: (a) Materials, Devices, and Design Technologies for Nanoelectronic Systems Beyond Ultimately Scaled CMOS, (b) Laboratory on Chip, and (c) Development and Characterization of Nanowires for Applications in Bioelectronics. In these
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