New method of photochemical adhesion of fused silica glasses by using Xe2 excimer lamp
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1054-FF05-31
New method of photochemical adhesion of fused silica glasses by using Xe2 excimer lamp Takayuki Funatsu1, Yuji Sato2, Yoshiaki Okamoto3, and Masataka Murahara2 1
Department of Mechanical Sciences and Engineering, Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro-ku, Tokyo, 152-8550, Japan 2
Entropia Laser Initiative, Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro-ku, Tokyo, 152-8552, Japan 3
Okamoto Optic Co, 8-34 Haramachi, Isogo-ku, Yokohama, Kanagawa, 235-0008, Japan
ABSTRACT A strong adhesion of two silica glasses or a silica glass and a different kind glass that creates properties of no adhesive strain, and high transmittance in the region of ultraviolet [UV] was demonstrated with photochemical oxidation of silicone oil using vacuum-ultraviolet [V-UV] light. The adhesive strength of several materials with SiO2 (silica glass), have been measured; 18 MPa for SiO2, 12.3 MPa for BK7, 10 MPa for TEMPAX®, 7.4 MPa for CLEARCERAM®. Furthermore, the no adhesive strain on SiO2-SiO2 sample was measured by a 3-dimension roughness meter (ZYGO). INTRODUCTION In general, fused silica glass has high transmittance wavelength band to infrared rays from UV. Therefore, the fused silica glass is widely used for the optical window, optical fiber, high power laser mirror, and semiconductor exposure apparatus. Recently, a more effective adhesive for transmitting in UV region is needed for scaling up of optical machinery and tools such as semiconductor exposure apparatus, high power laser mirror and so on. The bonding method for optical materials is generally used for heat sealing, silicone or epoxy or UV curing adhesives and Optical contact. However, the heat-sealing cannot be used for surface of optical glasses because it causes thermal distortion. H.K.Kiml et al have developed novel organic UV-curable adhesives for optical device of fiber [1]. They have been designed over 150kgf/cm2 for adhesion strength of bonded BK7 with UV-curing material, which is contained fluorine, methoxy-silane and colloidal silica. However, these adhesives are low transparency from UV to visible because they are organic matters and contained curing agent. On the other hand, Optical contact is method of holding objects together without the use of an adhesive. Therefore, this method is the only way to transmit UV rays under the 250nm. However, it requires a high precision roughness to use the intermolecular force. Smith and Gussenhoven experimented with optical bonding of polished quartz substrates under high
vacuum in 1965 [2]. They reported that the adhesive strength of single-crystal quartz, which is surface roughness about 15nm, was 14 kg/cm2 by Optical contact. To obtain high adhesive strength by Optical contact is required more smooth surface roughness. Moreover, it is so weak in slight vibration that its field of use is limited. Therefore, the new method of strong adhesion was required for the optical materials to transmittance in the region of UV to near infrared rays. Thus, we developed new adhesive method of the fu
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