Novel 3-D MEMS Approach to Digitally Printing Organic Semiconductors
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Novel 3-D MEMS Approach to Digitally Printing Organic Semiconductors
Martin W. Schoeppler Spectra, Inc., Santa Clara, California, USA 95050 ABSTRACT Ink jet printheads are now widely used in manufacturing processes that require precise dispensing of materials. In response to requirements for dispensing novel electronic fluids, we are developing next generation jetting technology based on our silicon MEMS technology with a three-dimensional silicon technology and a piezo-based pumping chamber integrated into the chip structure. Examples of opportunities and applications in electronics packaging for MEMSbased ink jet technology will be presented.
INTRODUCTION Almost any manufacturing operation that requires the precise metering of materials to specified locations on substrates is a candidate market for industrial ink jet printheads. Ink jet technology offers economic advantages in cases where the material to be deposited is expensive, management of waste fluid is an issue, and variable patterns are desired. Digital deposition potentially eliminates the need to create photomasks, eliminating steps expensive in both time and money. Ink jet printheads offer the advantage of non-contact, thus minimizing contamination.
APPLICATIONS FOR INK JET PRECISION DISPENSING PRINTHEADS Practical manufacturing systems require the integration of precision hardware, applicationspecific "inks," and specially designed ink jet print heads. The overall printing system ultimately dictates reliability and productivity, two keys to successful manufacturing. In particular, the system must enable a maintenance regimen appropriate for the jetting fluid and the application. The use of ink jets for digitally patterning electronic fluids is driven by at least three factors: 1. It is an additive process to accurately deposit material in one step 2. It is a digital process with the capability to write data and continuously change the output 3. It provides a non-impact method to deposit significant quantities of material [1] The suitability of a printhead for a given application is determined by a variety of factors. Some of these are the availability of jettable fluids, desired feature size and thickness, productivity or printing speed, absence of satellites. Feature size is determined by drop volume and by the interaction of jetting fluid with the substrate.
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INK JETS FOR DISPENSING ELECTRONIC FLUIDS Commercial and industrial ink jet printers utilize piezo-based drop-on-demand ink jets to print with the high reliability rates required by production equipment. This makes piezo ink jet technology an ideal match for electronics and FPD manufacture where precise metering and reliability requirements for a robust production process are of great importance. Working from Spectra's experience in manufacturing printheads for industrial and commercial markets, we designed a printhead, SX-128, to meet the production requirements for display applications. Now that the SX-128 is used in a variety of display manufacturing programs, we identifie
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