Opportunities and Challenges to Sustainable Manufacturing and CMP
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1157-E03-08
Opportunities and Challenges to Sustainable Manufacturing and CMP
David A. Dornfeld University of California, Mechanical Engineering, Berkeley, CA 94720-1740, USA
ABSTRACT Today the requirements for reducing the impact of our manufacturing activities are increasing as the world awakes to and addresses the environmental impacts of our society. Energy consumption, greenhouse gas emissions, materials availability and use, environmental impact levels, etc. are all topics of interest. Semiconductor manufacturing in general and process steps such as CMP are not exempt from this and, in many cases, the industry has led the efforts in reducing impacts. This paper will first review some of the drivers for sustainable manufacturing, then define some of the terms that will be useful for determining the engineering aspects of sustainability and sustainable manufacturing, as well as metrics for assessing the impact of manufacturing in general and CMP in particular. An assessments of CMP will be given to illustrate the potential for “design for the environment” in CMP and related processes. Consideration will be given to research opportunities, including process modeling, that this focus provides to CMP researchers, consumable suppliers and industry. INTRODUCTION The move towards sustainable systems and development is accelerating due to the input on the challenges facing the planet from a large number of directions – from scientific societies to consumers. How this movement is perceived by manufacturers and responded to by the engineers engaged in production is not clear. The definitions are varied and, often, not scientifically based. The metrics for comparison or quantification not defined. The relationship between environmental, societal and business aspects of sustainability and engineering principles governing manufacturing are not clear. However, it is important that efforts be made to help define these terms, derive these metrics and help establish these critical relationships. This is important to meet the demands of government, consumers, and the competitive market. From a business perspective, the uncertainty about some of these issues pose real risks to businesses. Finally, as educators, it is important to develop a clear set of engineering principles and tools to equip our students to fully participate in addressing these challenges. Whether or not one agrees with the predictions about global warming, the generation of greenhouse gases, etc. it is clear that energy and resources of production are costly and the costs are likely to increase. Costs of control and disposal of materials used in production, along with the normal environmental health and safety requirements, are likely to increase as well. Scarcity
of water and other materials, independent of environmental concerns, is another risk to industry. Lester Brown underlined the importance of this as follows [1]: “Today, we need a shift in how we think about the relationship between the earth and the economy. This shift is no less fundamental tha
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