Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators
Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators shows how to design and fabricate optical microsystems using innovative technologies and and original architectures. A barcode scanner, laser projection mirror and a microspectro
- PDF / 25,514,002 Bytes
- 278 Pages / 439.37 x 666.142 pts Page_size
- 56 Downloads / 139 Views
MICROSYSTEMS Volume 8 Series Editor Stephen D. Senturia Massachusetts Institute of Technology
Editorial Board Roger T. Howe, University of California, Berkeley D. Jed Harrison, University of Alberta Hiroyuki Fujita, University of Tokyo Jan-Ak:e Schweitz, Uppsala University
OTHER BOOKS IN THE SERIES: Methodology for the Modelling and Simulation of Microsystems Bartlomiej F. Romanowicz Hardbound, ISBN 0-7923-8306-0, October 1998 Microcantilevers for Atomic Force Microscope Data Storage Benjamin W. Chui Hardbound, ISBN 0-7923-8358, October 1998 Bringing Scanning Probe Microscopy Up to Speed Stephen C. Mione, Scott R. Manalis, Calvin F. Quate Hardbound, ISBN 0-7923-8466-0, February 1999 Micromachined Ultrasound-Based Proximity Sensors Mark R. Hornung, Oliver Brand Hardbound, ISBN 0-7923-8508-X, April1999 Microfabrication in Tissue Engineering and Bioartiticial Organs Sangeeta Bhatia Hardbound, ISBN 0-7923-8566-7, August 1999 Microscale Heat Conduction in Integrated Circuits and Their Constituent Films Y. Sungtaek Ju, Kenneth E. Goodson Hardbound, ISBN 0-7923-8591-8, August 1999 Scanning Probe Lithography Hyongsok T. Soh, Kathryn Wilder Guarini, Calvin F. Quate Hardbound, ISBN 0-7923-7361-8, June 2001
Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators Gerhard Lammel Sandra Schweizer and
Philippe Renaud EPFL, Swiss Federal Institute of Technology Lausanne
SPRINGER SCIENCE+BUSINESS MEDIA, LLC
A C.I.P. Catalogue record for this book is available from the Library of Congress.
ISBN 978-1-4419-4946-2 ISBN 978-1-4757-6083-5 (eBook) DOI 10.1007/978-1-4757-6083-5
ABOUT THE COVER
Left: Scanning electron microscope (SEM) picture of a wafer with an array of 2D micromirrOIs with "L" -shaped actuator beams, developed by Sandra Schweizer. The dry-release process leads to a high production yield. Right (series of four pictures): Tunable optical tilter of porous silicon in motion, developed by Gerhard Larnmel. Under a voltage of O to 2.1 voit the plate turns by 90° and changes the filter wavelength.
Printed an acid-free paper
AU Rights Reserved © 2002 Springer Science+Business Media New York Originally published by Kluwer Academic Publishers, Boston in 2002 No part of the material protected by this copyright notice may be reproduced or utilized in any form OI by any means, electronic OI mechanical, including photocopying, recording or by any information storage and retrieval system, without written permis sion from the copyright owner.
TABLE OF CONTENTS
Preface ............................................... ......... xi
1
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
1.1 Motivation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 1.2 MEMS ............................................... ...... 2 1.3 MOEMS ............................................... ..... 3 1.3.1 Display technologies ..................................... 3 1.3.2 Printers and industrial machining ..........
