Optoelectronic Integration: Physics, Technology and Applications
As we approach the end of the present century, the elementary particles of light (photons) are seen to be competing increasingly with the elementary particles of charge (electrons/holes) in the task of transmitting and processing the insatiable amounts of
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OPTOELECTRONIC INTEGRATION: PHYSICS, TECHNOLOGY AND APPLICATIONS
edited by
o. Wada
Fujitsu Laboratories Ltd.
....
"
SPRINGER SCIENCE+BUSINESS MEDIA, LLC
Library of Congress Cataloging-in-Publication Data Optoelectronic integration: physics, technology and applications/ edited by O. Wada. cm. p. Includes index. ISBN 978-1-4615-2686-5 (eBook) ISBN 978-0-7923-9453-2 DOI 10.1007/978-1-4615-2686-5 1. Optoelectronics. 2. Integrated Optics. 3. Semiconductors. 4. Optoelectronic devices. 1. Wada, O. (Osamu), 1946- . TA1750.067244 1994 621. 381'045--dc20
Copyright
94-6977 CIP
1994 by Springer Science+Business Media New York Originally published by Kluwer Academic Publishers in 1994 Softcover reprint of the hardcover 1st edition 1994
All rights reserved. No part of this publication may be reproduced, stored in a retrieval system or transmitted in any form or by any means, mechanical, photo-copying, recording, or otherwise, without the prior written permission of the publisher, Springer Science+Business Media, LLC.
Printed on acid{ree paper.
Table of Contents Foreword: P. N. Robson Preface: O. Wada
Chapter 1:
Optoelectronic Integration - Overview O. Wada
Chapter 2:
Physical Basis of Optoelectronic Integration . . . . . . . 17 H. Matsueda
Chapter 3:
ill-V Compound Semiconductor Epitaxy for Optoelectronic Integration . . . . . . . . . . . . . . . . . . 61 M.Ilegems
Chapter 4:
Advanced Semiconductor Processing Technology T. Ishikawa and Y. Katayama
Chapter 5:
Long Wavelength Lasers and OEIC Transmitters .. 143 T. P. Lee and Y. H. Lo
Chapter 6:
Photodetectors and OEIC Receivers . . . . . . . . . . . 191 J. Mun
Chapter 7:
Waveguide Based Photonic Integrated Circuits .... 233 U. Koren
Chapter 8:
Electrophotonic Devices for Signal Processing and Computing . . . . . . . . . . . . . . . . . . . . . . . . 273 K. Kasahara
Chapter 9:
OEICs for Optical Interconnects . . . . . . . . . . . . . 321 S. D. Mukherjee
Chapter 10:
Hybrid Optoelectronic Integration and Packaging ... 375 H. Lockwood, P. Haugsjaa, C. Armiento and R. Boudreau
Chapter 11:
Network Systems Applications and Markets for Optoelectronic Integration. . . . . . . . . . . . . . .. . 423 A. Bergh, M. Goodman and R. Leheny
Subject Index
.. 107
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 447
Foreword As we approach the end of the present century, the elementary particles of light (photons) are seen to be competing increasingly with the elementary particles of charge (electrons/holes) in the task of transmitting and processing the insatiable amounts of infonnation needed by society. The massive enhancements in electronic signal processing that have taken place since the discovery of the transistor, elegantly demonstrate how we have learned to make use of the strong interactions that exist between assemblages of electrons and holes, disposed in suitably designed geometries, and replicated on an increasingly fine scale. On the other hand, photons interact extremely weakly amongst themselves and all-photonic active ci
