Piezoelectric MEMS Resonators
This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturin
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Harmeet Bhugra Gianluca Piazza Editors
Piezoelectric MEMS Resonators
Microsystems and Nanosystems
Series editors Roger T. Howe, Stanford, CA, USA Antonio J. Ricco, Moffett Field, CA, USA
More information about this series at http://www.springer.com/series/11483
Harmeet Bhugra • Gianluca Piazza Editors
Piezoelectric MEMS Resonators
123
Editors Harmeet Bhugra MEMS Division Engineering Director, IDT Inc. San Jose, CA, USA
Gianluca Piazza Department of Electrical and Computer Engineering Carnegie Mellon University Pittsburgh, PA, USA
ISSN 2198-0063 ISSN 2198-0071 (electronic) Microsystems and Nanosystems ISBN 978-3-319-28686-0 ISBN 978-3-319-28688-4 (eBook) DOI 10.1007/978-3-319-28688-4 Library of Congress Control Number: 2016959445 © Springer International Publishing Switzerland 2017 This work is subject to copyright. All rights are reserved by the Publisher, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilms or in any other physical way, and transmission or information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed. The use of general descriptive names, registered names, trademarks, service marks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. The publisher, the authors and the editors are safe to assume that the advice and information in this book are believed to be true and accurate at the date of publication. Neither the publisher nor the authors or the editors give a warranty, express or implied, with respect to the material contained herein or for any errors or omissions that may have been made. Printed on acid-free paper This Springer imprint is published by Springer Nature The registered company is Springer International Publishing AG The registered company address is: Gewerbestrasse 11, 6330 Cham, Switzerland
Preface
This book is meant to introduce piezoelectric microelectromechanical system (MEMS) resonators to a broad audience of engineers, graduate students, and researchers with the scope of offering a review of the field as well as generating excitement for future research work and stimulating entrepreneurial activities in this area. The progress enabled by MEMS manufacturing methods has transformed the field of acoustic resonators. Piezoelectric materials have historically been the workhorse of practically any mechanical resonator on the market. The use of quartz crystals and ceramic resonators is widespread and can be found in electronic oscillators, filters, physical and gravimetric sensors, microphones, and ultrasonic transducers just to mention a few examples. These devices have been going through constant improvements and miniaturization since their first implementation approximately 100 years ago. Nonetheless, th
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