Properties of Ti-Si-N Hard Coatings Prepared by Filtered Vacuum Arc Source and Magnetron Sputtering Cathode
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1159-G02-12
Properties of Ti-Si-N Hard Coatings Prepared by Filtered Vacuum Arc Source and Magnetron Sputtering Cathode Seunghun Lee, Igor Svadkovski, Jong-Kuk Kim, Do-Geun Kim* Korea Institute of Materials Science, 641-831, Korea * Corresponding Author; [email protected] ABSTRACT Ti-Si-N nanocomposite coatings have been investigated using a hybrid coating system. The elimination of macro particles and the control of Si content should be accompanied to realize high quality of coating layer since macro particles induce corrosive reaction and the Si content of Ti-Si-N coating affects the mechanical properties such as hardness and friction coefficient. We introduced the hybrid coating system which consists of double bending filtered vacuum arc system (DBFVAS) and magnetron sputter cathode to solve two problems such as the macro particles and the control of Si content in Ti-Si-N coatings. The DBFVAS and magnetron sputter equipped with Ti cathode and Si cathode target, respectively. Ar and N2 are used for discharge and reaction gas and operating pressure is 0.6 mTorr. We confirmed that the DBFVAS reduced macro particles effectively and the Si content could be changed by controlling the applied power on magnetron sputtering cathode. The properties of Ti-Si-N coating layer are estimated by X-ray diffraction, X-ray photoelectron spectroscopy, wear test and nano indentation. And we compared Si content with Si emission (594.84 nm) of process chamber using an optical emission spectroscopy. INTRODUCTION Nowadays, multi components coating technologies were actively investigated to improve surface properties such as hardness, friction coefficient, thermal stability and oxidation resistance. Various combinations of multi components like Ti-Si-N, Ti-Si-C-N, Ti-Al-N have been proposed to realize a multi functional film which can be adapted to hard operation conditions such as high temperature, high speed and high pressure [1-3]. Especially, Ti-Si-N nanocomposite deposition has been studied by many researchers because of its high hardness about 45 GPa [1]. Deposition with combining several components needs multi sources system or multi gases discharge thus many groups tried to find the optimized environment to achieve high deposition rate as well as good film quality. Kim has researched widely about Ti-Si-N nanocomposite coatings using vacuum arc and magnetron sputter [1]. In spite of high ionization rate of vacuum arc source, macro particles generated by arc spot become a serious problem to induce high roughness and bad corrosion resistance. Alternatively a filtered vacuum arc system was introduced to solve macro particle problem [4]. The filtered vacuum arc usually uses a bending duct with magnetic field to transport charged particle only except neutral macro particle. Many types of bending duct such as T-type, L-type and double bending type are proposed to reduce the macro particle flux on substrate [5-6]. It is reported that the nanocomposite film prepared by the filtered vacuum arc has good corrosion resistance as well as hi
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