Properties of Zinc Oxide Doped Indium, Magnesium and Aluminum Oxide Films used on Flexible Substrates
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1035-L05-03
Properties of Zinc Oxide Doped Indium, Magnesium and Aluminum Oxide Films used on Flexible Substrates Shih Hsiu Hsiao, Yoshikazu Tanaka, and Ari Ide-Ektessabi Mechanical Engineering and Science, Kyoto University, Kyoto, 606-8317, Japan ABSTRACT Zinc oxide was considered to be substitute for indium tin oxide (ITO) as the transparent conductive oxide (TCO) films used in display industry according to indium is a rare and expensive metal. For the flexible display, the polymeric materials used as the flexible substrates are more bendable and lighter weight compared to the glass substrates used in flat panel display. However, the thermal sensitivity of polymer affects the properties of TCOs layers when it was deposited at room temperature. In this study, we doped the different ratio of indium oxide, magnesium oxide and aluminum oxide into zinc oxide to improve the properties of zinc oxide used as the TCOs films deposited by the sputtering method. The polyethylene terephthalate (PET) was used as the flexible substrate without thermal process and the glass was used as the comparison substrate with annealing. The light transmittance and the surface resistivity were measured. The chemical composition and the crystal structure were analyzed by using Rutherford backscattering spectrometry and X-ray diffraction measurement.
INTRODUCTION The flexible display means the display constructed of thin substrates can be bent to a radius of curvature without losing functionality. The transparent conductive oxides (TCOs) behave as electrodes and deposited on glass substrate for flat panel display industry. Consequently, it is demanded to coat the TCOs material on the flexible substrates as electrodes for the flexible display. For the selection of TCOs materials currently, indium tin oxide (ITO) is entirely used in the majority material due to its superior combination of environmental stability, relatively low electrical resisitivity and high light transmission, However, indium is a rare metal and expensive. The alternative metal oxides like zinc oxide (ZnO) and a few metal oxides doping ZnO have been experimented. The polymer substrates are flexible and lightweight compared to glass substrates, but they have the additional restrictions on their sensitivity to heat treatment and suffer from dimensional and structural instability. The almost polymer based substrates are
melted at the common 300
℃ deposition process for TCOs films in industry. To achieve the
suitable optical and electrical properties at low process temperature plays a important role for flexible display. In this study, polyethylene terephthalate (PET) was used as the main substrate. The ITO, ZnO and In2O3, MgO, Al2O3 doped ZnO were used as the target materials deposited by sputtering method in the various conditions.
EXPERIMENT RF magnetron sputtering was used to deposit TCOs thin films on the untreated, optical grade commercial PET with 125um thickness. The glass slides, silicon and carbon substrates were deposited at the same condition for the thin films
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