Properties of Transparent Conductive Oxide Films on Flexible Substrates
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Properties of Transparent Conductive Oxide Films on Flexible Substrates Shih Hsiu Hsiao1, Yoshikazu Tanaka1, and Ari Ide-Ektessabi2 1
Mechanical Engineering and Science, Kyoto University, Kyoto, 606-8317, Japan
2
International Innovation Center, Kyoto University, Kyoto, 606-8317, Japan
ABSTRACT Transparent conductive oxide (TCO) thin films are extensively used in display industry and they can be utilized for flexible displays. The polymer materials used as flexible substrates are more bendable and lighter weight compared to glass substrates. However, its mechanical and surface properties differed from glass substrates result in different quality of TCO layers deposited on it. In this study, Polyethylene Terephthalate (PET) and glass were used as substrates. Indium Tin Oxide (ITO), Zinc Oxide (ZnO), Mg-doped ZnO (MZO), Al-doped ZnO (AZO), Ga-doped ZnO (GZO), Al-doped MZO (AMZO), Ga-doped MZO (GMZO) were used as TCO materials deposited by RF sputtering. Rutherford Backscatter Spectroscopy (RBS) and X-Ray Diffraction (XRD) were used to analyze the chemical composition and crystal structure of TCO thin films. Light transmittance and surface resistivity were measured after the different deposited conditions. , Mg-, Al-, Ga- doped ZnO indeed modified the optical properties of ZnO and better than ITO. However, the electrical conductivity was not improved obviously compared to ITO when they deposited on PET substrate at room temperature.
INTRODUCTION The transparent conductive oxide (TCO) behaves as electrodes for most flat panel display technologies. The flexible display means the display constructed of thin substrates can be bent to a radius of curvature without losing functionality. The TCO electrodes on glass substrates play the important role in display industry. Consequently, the flexible substrates with high quality TCO electrodes are the key components for the flexible displays. A review for the selection of TCO materials at present for display application, Indium Tin Oxide (ITO) is entirely used in the majority of high-performance display application due to its superior combination of environmental stability, relatively low electrical resisitivity and high light transmittance, but Indium is a rare metal and expensive. The various oxide materials like Zinc oxide (ZnO) and a few oxides doped ZnO have been experimented as TCOs, and they also can
be utilized on polymer substrates for the flexible displays. The polymer substrates are flexible and lightweight compared to glass substrates. However, Polymer substrates impose additional restrictions on their sensitivity to heat treatment and suffer from dimensional and structural instability when it exposed to heat. The material required is doping the wide band gap crystalline oxide to activate optical and electrical properties at low process temperature. In this study, Polyethylene Terephthalate (PET) and glass both were used as the substrates. The ITO, ZnO and Mg-doped, Al-doped, Ga-doped ZnO were used as alloy deposited targets by sputtering in the d
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