Automated Nanohandling by Microrobots
The rapid development of nanotechnology has created a need for advanced nanohandling tools and techniques. One active branch of research in this area focuses on the use of microrobots for automated handling of micro- and nanoscale objects. Automated Nanoh
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Series Editor Professor D.T. Pham Manufacturing Engineering Centre Cardiff University Queen’s Building Newport Road Cardiff CF24 3AA UK Other titles published in this series Assembly Line Design B. Rekiek and A. Delchambre Advances in Design H.A. ElMaraghy and W.H. ElMaraghy (Eds.) Effective Resource Management in Manufacturing Systems: Optimization Algorithms in Production Planning M. Caramia and P. Dell’Olmo Condition Monitoring and Control for Intelligent Manufacturing L. Wang and R.X. Gao (Eds.) Optimal Production Planning for PCB Assembly W. Ho and P. Ji Trends in Supply Chain Design and Management: Technologies and Methodologies H. Jung, F.F. Chen and B. Jeong (Eds.) Process Planning and Scheduling for Distributed Manufacturing L. Wang and W. Shen (Eds.) Collaborative Product Design and Manufacturing Methodologies and Applications W.D. Li, S.K. Ong, A.Y.C. Nee and C. McMahon (Eds.) Decision Making in the Manufacturing Environment R. Venkata Rao Frontiers in Computing Technologies for Manufacturing Applications Y. Shimizu, Z. Zhong and R. Batres Reverse Engineering: An Industrial Perspective V. Raja and K. J. Fernandes (Eds.)
Sergej Fatikow Editor
Automated Nanohandling by Microrobots
123
Sergej Fatikow, Professor, Dr.-Ing. habil. Department of Computing Science University of Oldenburg 26111 Oldenburg Germany
ISBN 978-1-84628-977-4
e-ISBN 978-1-84628-978-1
Springer Series in Advanced Manufacturing ISSN 1860-5168 British Library Cataloguing in Publication Data Fatikow, S. (Sergej), 1960Automated nanohandling by microrobots. - (Springer series in advanced manufacturing) 1. Microfabrication 2. Microelectromechanical systems 3. Robotics 4. Nanostructured materials 5. Robots, Industrial I. Title 620.5 ISBN-13: 9781846289774 Library of Congress Control Number: 2007933584 © 2008 Springer-Verlag London Limited Apart from any fair dealing for the purposes of research or private study, or criticism or review, as permitted under the Copyright, Designs and Patents Act 1988, this publication may only be reproduced, stored or transmitted, in any form or by any means, with the prior permission in writing of the publishers, or in the case of reprographic reproduction in accordance with the terms of licences issued by the Copyright Licensing Agency. Enquiries concerning reproduction outside those terms should be sent to the publishers. The use of registered names, trademarks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant laws and regulations and therefore free for general use. The publisher makes no representation, express or implied, with regard to the accuracy of the information contained in this book and cannot accept any legal responsibility or liability for any errors or omissions that may be made. Printed on acid-free paper 9 8 7 6 5 4 3 2 1 springer.com
Preface
“What I want to talk about is the problem of manipulating and controlling things on a small scale” stated Richard P. Feynman at the beginning of his visionary talk “
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