Designing Block Copolymers for Nanolithography using Mesoscale Modeling: Line-Space Graphoepitaxy
- PDF / 583,259 Bytes
- 11 Pages / 432 x 648 pts Page_size
- 60 Downloads / 150 Views
'HVLJQLQJ%ORFN&RSRO\PHUVIRU1DQROLWKRJUDSK\XVLQJ0HVRVFDOH0RGHOLQJ/LQH6SDFH *UDSKRHSLWD[\
9DOHUL\9*LQ]EXUJ3KLOOLS'+XVWDG'DQ%0LOOZDUGDQG3HWHU7UHIRQDV 7KH'RZ&KHPLFDO&RPSDQ\%XLOGLQJ0LGODQG0,86$
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²QP7KHEORFNFRSRO\PHUVWUXFWXUHVODPHOODUKH[DJRQDOF\OLQGULFDOERG\FHQWHUHG FXELF VSKHULFDO J\URLG HWF KDYH EHHQ VXFFHVVIXOO\ GHVFULEHG XVLQJ YDULRXV PHVRVFDOH FRPSXWDWLRQDO PRGHOV 0RQWH &DUOR >0&@ VLPXODWLRQV FRDUVHJUDLQHG PROHFXODU G\QDPLFV 6HOI&RQVLVWHQW )LHOG 7KHRU\ >6&)7@ :LWK LWV DELOLW\ WR SUHGLFW SHUIRUPDQFH FRPSXWDWLRQDO PRGHOLQJLVFXUUHQWO\SOD\LQJDQLPSRUWDQWUROHLQGHVLJQLQJSRO\PHUIRUPXODWLRQVIRU'6$ ,QWKLVSDSHUZHXVH6&)7WRVWXG\WKHVHOIDVVHPEO\RIKLJKχZKHUHχLVWKH)ORU\ +XJJLQV LQWHUDFWLRQ SDUDPHWHU EORFN FRSRO\PHUV VXFK DV 36E3'06 LQ OLQHVSDFH JUDSKRHSLWD[\,QWKLVSURFHVV)LJXUHD QPLPPHUVLRQ89OLWKRJUDSK\LVILUVWXVHGWR FUHDWH JXLGHOLQHV UHIHUUHG WR DV ³ZHLUV´ WKH JXLGHOLQHV DUH WKHQ FRDWHG ZLWK 36 EUXVKHV WKH VXEVWUDWHLVEDNHGWRFRYDOHQWO\JUDIWWKHEUXVKWRWKHZHLUVDQGVXEVHTXHQWO\ULQVHG)LJXUHVE F 7KH EORFN FRSRO\PHU LV
Data Loading...