Development of Integrated Multi-Station System to Precisely Detect and Mitigate Surface Damage on Fused Silica Optics
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International Journal of Precision Engineering and Manufacturing https://doi.org/10.1007/s12541-020-00433-6
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Development of Integrated Multi-Station System to Precisely Detect and Mitigate Surface Damage on Fused Silica Optics Lin‑Jie Zhao1,2 · Jian Cheng1 · Ming‑Jun Chen1 · Xiao‑Dong Yuan2 · Wei Liao2 · Hao Yang1 · Qi Liu1 · Hai‑Jun Wang2 Received: 28 October 2019 / Revised: 15 May 2020 / Accepted: 19 October 2020 © Korean Society for Precision Engineering 2020
Abstract In high power laser facility, irreversible damage on fused silica optics, induced by laser irradiation or processing, seriously affects the service life of optics. Therefore, the work of inhibiting damage growth has been carried out in various countries. In our work, an integrated multi-station system is designed to detect and mitigate surface damage on fused silica. The process of processing fused silica optics include UV laser conditioning, surface damage detection and surface damage mitigation with CO2 laser. UV laser conditioning pre-initiates surface damage on fused silica optics with the laser flux less than Laser-Induced Damage Threshold (LIDT). Images of surface damage acquired from camera are processed by improved global threshold segmentation algorithm to extract damage information. Finally, CO2 laser is applied to process the damage with specific morphology to enhance the laser damage resistance. This integrated multi-station system saves the repeated optics installation time between the workstations with the positioning accuracy of 20 μm. Furthermore, the damage with diameter of 10 μm is mitigated to prolong service life of processed fused silica optics. The efficient and accurate integrated multi-station system is of great significance for off-line detecting and mitigating surface damage of fused silica optics in high power laser facility. Keywords Fused silica optics · CO2 laser mitigation · UV laser conditioning · Damage detection · Integrated multi-station system
1 Introduction Fused silica is one of the most important final optics applied in high power laser facility, which focuses the 3ω laser to target. The National Ignition Facility (NIF) at Lawrence Livermore National Laboratory (LLNL), Laser Megajoule (LMJ) at French Atomic Energy Commission and ShenGuang-III at China Academy of Engineering Physics require thousands of high quality fused silica, which can withstand repeated high energy laser shots [1–3]. However, the process-induced subsurface defects, including polished layer, defect layer and Lin-Jie Zhao and Jian Cheng have contributed equally to this work. * Jian Cheng [email protected] * Ming‑Jun Chen [email protected] 1
State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin 150001, China
Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China
2
deformed layer, after the traditional processing will induce cracking points on the surface during high-power laser irradiates, and form laser-induced damage with characteristic s
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