Effects of Electrode Configurations on Internal Stress Distribution of Multilayer Actuators
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Effects of Electrode Configurations on Internal Stress Distribution of Multilayer Actuators Dong-Kyun Lee1, Ji-Won Choi, Deuk-Young Han1, Hyun-Jai Kim, and Seok-Jin Yoon Thin Film Materials Research Center, Korea Institute of Science and Technology, Seoul 130-650, Korea 1 Department of Electrical Engineering, Konkuk University, Seoul, 143-701, Korea ABSTRACT The internal stress distribution in multilayer actuator was analyzed by a numerical simulation. Around the edge of conventional inter-digital electrodes, the non-uniform electric field generated the stress concentration, which caused the ceramic to crack. Various electrode configurations were presented to decrease this stress concentration. Especially the float electrode type is a promising design because this can be fabricated using almost the same process as the conventional multilayer actuator, and the simulated results indicted that the float electrode type decreased the stress concentration of inter-digital type in approximately 1/3. INTRODUCTION Actuator is defined as the device of conversion of electric energy into mechanical energy. The piezoelectric actuators have been used widely in applications such as positioners, miniature ultrasonic motors, and adaptive mechanical dampers. Especially, multilayer actuators are used for practical applications because of low driving voltage, large blocking force (~200MPa), precise positioning, and quick response (
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